Fabrication of a Polymer Micro Needle Array by Mask-Dragging X-Ray Lithography and Alignment X-Ray Lithography
LI Yi-Gui1**, YANG Chun-Sheng1, LIU Jing-Quan1, SUGIYAMA Susumu2
1Institute of Key Laboratory for Thin Film and Microfabrication Technology of Ministry of Education, Research Institute of Micro/Nano Science and Technology, Shanghai Jiao Tong University, Shanghai 200240 2Global Innovation Research Center, Ritsumeikan University, Kusatsu, Shiga 525-8577, Japan
Fabrication of a Polymer Micro Needle Array by Mask-Dragging X-Ray Lithography and Alignment X-Ray Lithography
LI Yi-Gui1**, YANG Chun-Sheng1, LIU Jing-Quan1, SUGIYAMA Susumu2
1Institute of Key Laboratory for Thin Film and Microfabrication Technology of Ministry of Education, Research Institute of Micro/Nano Science and Technology, Shanghai Jiao Tong University, Shanghai 200240 2Global Innovation Research Center, Ritsumeikan University, Kusatsu, Shiga 525-8577, Japan
摘要Polymer materials such as transparent thermoplastic poly(methyl methacrylate) (PMMA) have been of great interest in the research and development of integrated circuits and micro-electromechanical systems due to their relatively low cost and easy process. We fabricated PMMA-based polymer hollow microneedle arrays by mask-dragging and aligning x-ray lithography. Techniques for 3D micromachining by direct lithography using x-rays are developed. These techniques are based on using image projection in which the x-ray is used to illuminate an appropriate gold pattern on a polyimide film mask. The mask is imaged onto the PMMA sample. A pattern with an area of up to 100 ×100 mm2 can be fabricated with sub-micron resolution and a highly accurate order of a few microns by using a dragging mask. The fabrication technology has several advantages, such as forming complex 3D micro structures, high throughput and low cost.
Abstract：Polymer materials such as transparent thermoplastic poly(methyl methacrylate) (PMMA) have been of great interest in the research and development of integrated circuits and micro-electromechanical systems due to their relatively low cost and easy process. We fabricated PMMA-based polymer hollow microneedle arrays by mask-dragging and aligning x-ray lithography. Techniques for 3D micromachining by direct lithography using x-rays are developed. These techniques are based on using image projection in which the x-ray is used to illuminate an appropriate gold pattern on a polyimide film mask. The mask is imaged onto the PMMA sample. A pattern with an area of up to 100 ×100 mm2 can be fabricated with sub-micron resolution and a highly accurate order of a few microns by using a dragging mask. The fabrication technology has several advantages, such as forming complex 3D micro structures, high throughput and low cost.
LI Yi-Gui**;YANG Chun-Sheng;LIU Jing-Quan;SUGIYAMA Susumu
. Fabrication of a Polymer Micro Needle Array by Mask-Dragging X-Ray Lithography and Alignment X-Ray Lithography[J]. 中国物理快报, 2011, 28(3): 38101-038101.
LI Yi-Gui**, YANG Chun-Sheng, LIU Jing-Quan, SUGIYAMA Susumu
. Fabrication of a Polymer Micro Needle Array by Mask-Dragging X-Ray Lithography and Alignment X-Ray Lithography. Chin. Phys. Lett., 2011, 28(3): 38101-038101.
[1] Tang W C, Nguyen T C and Howe R T 1989 Tech. Dig. IEEE Micro ElectroMech. Syst. Workshop (Aichi-ken, Japan 22–25 October 1989) p 53
[2] Tang W C, Nguyen T C and Howe R T 1990 Sensors and Actuators A 21 328
[3] Kim S H, Lee S H and Kim Y K 2002 J. Micromech. Microeng. 12 128
[4] Ho C and Hsu W 2004 J. Micromech. Microeng. 14 356
[5] McNie M, King D, Vizard C, Holmes A and Lee K W 2000 Microsyst. Technol. 6 184
[6] Johnson W A and Warne L K 1995 J. Microelectromech. Syst. 4 49
[7] Zhao Y and Cui T 2003 J. Micromech. Microeng. 13 430
[8] Li Y G and Sugiyama S 2005 Memoirs of the SR Center Ritsumeikan University 7 19
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