中国物理快报  2012, Vol. 29 Issue (9): 98101-098101    DOI: 10.1088/0256-307X/29/9/098101
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A New Grating Fabrication Technique on Metal Films Using UV-Nanoimprint Lithography
TANG Min-Jin1, XIE Hui-Min1**, LI Yan-Jie1, LI Xiao-Jun2, WU Dan1
1AML, Department of Engineering Mechanics, Tsinghua University, Beijing 100084
2National Center for Nanoscience and Technology, Beijing 100084