中国物理快报  2012, Vol. 29 Issue (7): 74401-074401    DOI: 10.1088/0256-307X/29/7/074401
  FUNDAMENTAL AREAS OF PHENOMENOLOGY(INCLUDING APPLICATIONS) 本期目录 | 过刊浏览 | 高级检索 |
Enhancement Effect of Patterning Resolution Induced by an Aluminum Thermal Conduction Layer with AgInSbTe as a Laser Thermal Lithography Film
LI Hao1, WANG Rui1, GENG Yong-You1, WU Yi-Qun1,2**, WEI Jing-Song1
1Shanghai Institute of Optics and Fine Mechanics, Chinese Academy of Sciences, Shanghai 201800
2Key Lab of Functional Inorganic Material Chemistry (Ministry of Education), Heilongjiang University, Harbin 150080
Enhancement Effect of Patterning Resolution Induced by an Aluminum Thermal Conduction Layer with AgInSbTe as a Laser Thermal Lithography Film
LI Hao1, WANG Rui1, GENG Yong-You1, WU Yi-Qun1,2**, WEI Jing-Song1
1Shanghai Institute of Optics and Fine Mechanics, Chinese Academy of Sciences, Shanghai 201800
2Key Lab of Functional Inorganic Material Chemistry (Ministry of Education), Heilongjiang University, Harbin 150080