Enhancement Effect of Patterning Resolution Induced by an Aluminum Thermal Conduction Layer with AgInSbTe as a Laser Thermal Lithography Film
LI Hao1, WANG Rui1, GENG Yong-You1, WU Yi-Qun1,2**, WEI Jing-Song1
1Shanghai Institute of Optics and Fine Mechanics, Chinese Academy of Sciences, Shanghai 201800 2Key Lab of Functional Inorganic Material Chemistry (Ministry of Education), Heilongjiang University, Harbin 150080
Enhancement Effect of Patterning Resolution Induced by an Aluminum Thermal Conduction Layer with AgInSbTe as a Laser Thermal Lithography Film
LI Hao1, WANG Rui1, GENG Yong-You1, WU Yi-Qun1,2**, WEI Jing-Song1
1Shanghai Institute of Optics and Fine Mechanics, Chinese Academy of Sciences, Shanghai 201800 2Key Lab of Functional Inorganic Material Chemistry (Ministry of Education), Heilongjiang University, Harbin 150080
摘要We employ an aluminum (Al) film as a thermal conduction layer under the laser thermal lithography AgInSbTe phase-change film to improve the patterning resolution in laser thermal lithography. The patterns were fabricated by laser writing and wet-etching. The laser writing was conducted by a setup where the laser wavelength and the numerical aperture of the converging lens were 405 nm and 0.90, respectively. The wet-etching was carried out in a 17wt% ammonium sulfide solution. Experimental results indicate that the patterning resolution enhancement induced by an Al thermal conduction layer is more than 20% compared with that of the samples without an Al thermal conduction layer. The analysis reveals that the resolution-enhancing effect may be due to the changes of heat diffusion directions induced by the Al thermal conduction layer.
Abstract：We employ an aluminum (Al) film as a thermal conduction layer under the laser thermal lithography AgInSbTe phase-change film to improve the patterning resolution in laser thermal lithography. The patterns were fabricated by laser writing and wet-etching. The laser writing was conducted by a setup where the laser wavelength and the numerical aperture of the converging lens were 405 nm and 0.90, respectively. The wet-etching was carried out in a 17wt% ammonium sulfide solution. Experimental results indicate that the patterning resolution enhancement induced by an Al thermal conduction layer is more than 20% compared with that of the samples without an Al thermal conduction layer. The analysis reveals that the resolution-enhancing effect may be due to the changes of heat diffusion directions induced by the Al thermal conduction layer.
LI Hao, WANG Rui, GENG Yong-You, WU Yi-Qun, WEI Jing-Song. Enhancement Effect of Patterning Resolution Induced by an Aluminum Thermal Conduction Layer with AgInSbTe as a Laser Thermal Lithography Film[J]. 中国物理快报, 2012, 29(7): 74401-074401.
LI Hao, WANG Rui, GENG Yong-You, WU Yi-Qun, WEI Jing-Song. Enhancement Effect of Patterning Resolution Induced by an Aluminum Thermal Conduction Layer with AgInSbTe as a Laser Thermal Lithography Film. Chin. Phys. Lett., 2012, 29(7): 74401-074401.
2012, Vol. 29 
