The Morphology of Patterning with Pseudoplastic Metal Nanoparticle Fluids during Heat Treatment
WANG Wen1, SU Yu-Feng2, LIU Chao-Ran1,3, LI Dong-Xue1, WANG Pan1, DUAN Zhi-Yong1**
1Physical Engineering School, Zhengzhou University, Zhengzhou 450001 2Mechanical Engineering School, Zhengzhou University, Zhengzhou 450001 3Shanghai Institute of Microsystem and Information Technology, Chinese Academy of Sciences, Shanghai 200050
Abstract：A pseudoplastic metal nanoparticle fluid (PMNF) is used in nanoimprint to fabricate semiconductors and functional devices. The evaporation of the solvent and the sintering of the Au PMNF are investigated. The key parameters, which influence the morphology of patterning, such as the radius of metal particles, the concentration of metal particles, the Hamaker constant of the solvent, viscosity of the fluids and the evaporation velocity, are analyzed. Based on a two-sphere sintering model, the equations are derived, which represent the relationships between the relative shrinkage and radius of the metal particles, sintering temperature and time. The optimal parameters for the heat treatment are provided in nanoimprint.
(Micro- and nano-electromechanical systems (MEMS/NEMS) and devices)
引用本文:
. [J]. 中国物理快报, 2015, 32(12): 128102-128102.
WANG Wen, SU Yu-Feng, LIU Chao-Ran, LI Dong-Xue, WANG Pan, DUAN Zhi-Yong. The Morphology of Patterning with Pseudoplastic Metal Nanoparticle Fluids during Heat Treatment. Chin. Phys. Lett., 2015, 32(12): 128102-128102.
2015, Vol. 32 
