2011, Vol. 28(3): 38101-038101    DOI: 10.1088/0256-307X/28/3/038101
	Fabrication of a Polymer Micro Needle Array by Mask-Dragging X-Ray Lithography and Alignment X-Ray Lithography
	LI Yi-Gui1**, YANG Chun-Sheng1, LIU Jing-Quan1, SUGIYAMA Susumu2
	1Institute of Key Laboratory for Thin Film and Microfabrication Technology of Ministry of Education, Research Institute of Micro/Nano Science and Technology, Shanghai Jiao Tong University, Shanghai 200240 2Global Innovation Research Center, Ritsumeikan University, Kusatsu, Shiga 525-8577, Japan
	收稿日期 2010-10-13  修回日期 1900-01-01
	Supporting info
	[1] Tang W C, Nguyen T C and Howe R T 1989 Tech. Dig. IEEE Micro ElectroMech. Syst. Workshop (Aichi-ken, Japan 22–25 October 1989) p 53 [2] Tang W C, Nguyen T C and Howe R T 1990 Sensors and Actuators A 21 328 [3] Kim S H, Lee S H and Kim Y K 2002 J. Micromech. Microeng. 12 128 [4] Ho C and Hsu W 2004 J. Micromech. Microeng. 14 356 [5] McNie M, King D, Vizard C, Holmes A and Lee K W 2000 Microsyst. Technol. 6 184 [6] Johnson W A and Warne L K 1995 J. Microelectromech. Syst. 4 49 [7] Zhao Y and Cui T 2003 J. Micromech. Microeng. 13 430 [8] Li Y G and Sugiyama S 2005 Memoirs of the SR Center Ritsumeikan University 7 19