Synthesis of Nano-Crystalline Diamond Film in Hot Filament
Chemical Vapour Deposition by Adding Ar
ZHANG Yu-Feng, ZHANG Fan, GAO Qiao-Jun, YU Da-Peng, PENG Xiao-Fu, LIN Zeng-Dong
Department of Physics, Peking University, Beijing 100871
Beijing Institute of Powder Metallurgy, Beijing 100078
Synthesis of Nano-Crystalline Diamond Film in Hot Filament
Chemical Vapour Deposition by Adding Ar
ZHANG Yu-Feng;ZHANG Fan;GAO Qiao-Jun;YU Da-Peng;PENG Xiao-Fu;LIN Zeng-Dong
Department of Physics, Peking University, Beijing 100871
Beijing Institute of Powder Metallurgy, Beijing 100078
关键词 ：
81.15.Gh ,
68.55.-a ,
61.50.-f ,
61.16.Bg
Abstract ： Nano-crystalline diamond films are successfully deposited on silicon substrates via the hot filament chemical vapour deposition process using a CH4 /H2 /Ar gas mixture. The as-grown films are analysed by using field emission scanning electron microscopy, micro-Raman spectroscopy and x-ray diffraction. These results show that the films consist of nano-diamond grains with sizes ranging from 10 to 100 nm, and argon is an important element in the formation of nano-crystalline diamonds.
Key words ：
81.15.Gh
68.55.-a
61.50.-f
61.16.Bg
出版日期: 2001-02-01
:
81.15.Gh
(Chemical vapor deposition (including plasma-enhanced CVD, MOCVD, ALD, etc.))
68.55.-a
(Thin film structure and morphology)
61.50.-f
(Structure of bulk crystals)
61.16.Bg
引用本文:
ZHANG Yu-Feng;ZHANG Fan;GAO Qiao-Jun;YU Da-Peng;PENG Xiao-Fu;LIN Zeng-Dong. Synthesis of Nano-Crystalline Diamond Film in Hot Filament
Chemical Vapour Deposition by Adding Ar[J]. 中国物理快报, 2001, 18(2): 286-288.
链接本文:
https://cpl.iphy.ac.cn/CN/
或
https://cpl.iphy.ac.cn/CN/Y2001/V18/I2/286
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