中国物理快报  2004, Vol. 21 Issue (6): 1168-1170    
  Original Articles 本期目录 | 过刊浏览 | 高级检索 |
Fast Growth of Polycrystalline Film in SiCl4/H2 Plasma
HUANG Rui, LIN Xuan-Ying, YU Yun-Peng, LIN Kui-Xun, WEI Jun-Hong, YU Chu-Ying, WANG Zhao-Kui
Department of Physics, Shantou University, Shantou 515063
Fast Growth of Polycrystalline Film in SiCl4/H2 Plasma
HUANG Rui;LIN Xuan-Ying;YU Yun-Peng;LIN Kui-Xun;WEI Jun-Hong;YU Chu-Ying;WANG Zhao-Kui
Department of Physics, Shantou University, Shantou 515063