Synthesis of Nano-crystalline Diamond Films
ZHANG Fan1 , ZHANG Yu-Feng1 , GAO Qiao-Jun1 , ZHANG Shu-Lin1 ,LIN Ting2 , PENG Xiao-Fu3 , LIN Zeng-Dong3
1 Department of Physics, Peking University, Beijing 100871
2 Department of Physics, National University of Singapore, Singapore 119260
3 Beijing Institute of Powder Metallurgy, Beijing 100078
Synthesis of Nano-crystalline Diamond Films
ZHANG Fan1 ;ZHANG Yu-Feng1 ;GAO Qiao-Jun1 ;ZHANG Shu-Lin1 ,LIN Ting2 ;PENG Xiao-Fu3 ;LIN Zeng-Dong3
1 Department of Physics, Peking University, Beijing 100871
2 Department of Physics, National University of Singapore, Singapore 119260
3 Beijing Institute of Powder Metallurgy, Beijing 100078
关键词 ：
81.15.Gh ,
68.55.-a ,
61.50.-f ,
61.16.Bg
Abstract ： We have deposited nano-crystalline diamond films in a routine hot filament chemical vapor deposition system, using CH4 /H2 gas mixture. We used various measurements such as field emission scanning electron microscopy, micro-Raman spectroscopy, x-ray photoelectron spectroscopy, and transmission electron microscopy for characterization. The result show that the films consist of a crystalline diamond phase with small grain sizes ranging from 20 to 100nm.
Key words ：
81.15.Gh
68.55.-a
61.50.-f
61.16.Bg
出版日期: 2000-05-01
:
81.15.Gh
(Chemical vapor deposition (including plasma-enhanced CVD, MOCVD, ALD, etc.))
68.55.-a
(Thin film structure and morphology)
61.50.-f
(Structure of bulk crystals)
61.16.Bg
引用本文:
ZHANG Fan;ZHANG Yu-Feng;GAO Qiao-Jun;ZHANG Shu-Lin;LIN Ting;PENG Xiao-Fu;LIN Zeng-Dong. Synthesis of Nano-crystalline Diamond Films[J]. 中国物理快报, 2000, 17(5): 376-378.
链接本文:
https://cpl.iphy.ac.cn/CN/
或
https://cpl.iphy.ac.cn/CN/Y2000/V17/I5/376
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