Optimization of Gas Sensing Performance of Nanocrystalline SnO$_{2}$ Thin Films Synthesized by Magnetron Sputtering
N. Panahi1**, M. T. Hosseinnejad2, M. Shirazi2, M. Ghoranneviss3
1Department of Physics, Bandar Abbas Branch, Islamic Azad University, Bandar Abbas, Iran 2Young Researchers and Elite Club, Science and Research Branch, Islamic Azad University, Tehran, Iran 3Plasma Physics Research Center, Science and Research Branch, Islamic Azad University, Tehran, Iran
Abstract：Tin oxide (SnO$_{2}$) is one of the most promising transparent conducting oxide materials, which is widely used in thin film gas sensors. We investigate the dependence of the deposition time on structural, morphological and hydrogen gas sensing properties of SnO$_{2}$ thin films synthesized by dc magnetron sputtering. The deposited samples are characterized by XRD, SEM, AFM, surface area measurements and surface profiler. Also the H$_{2}$ gas sensing properties of SnO$_{2}$ deposited samples are performed against a wide range of operating temperature. The XRD analysis demonstrates that the degree of crystallinity of the deposited SnO$_{2}$ films strongly depends on the deposition time. SEM and AFM analyses reveal that the size of nanoparticles or agglomerates, and both average and rms surface roughness is enhanced with the increasing deposition time. Also gas sensors based on these SnO$_{2}$ nanolayers show an acceptable response to hydrogen at various operating temperatures.
. [J]. 中国物理快报, 2016, 33(06): 66802-066802.
N. Panahi, M. T. Hosseinnejad, M. Shirazi, M. Ghoranneviss. Optimization of Gas Sensing Performance of Nanocrystalline SnO$_{2}$ Thin Films Synthesized by Magnetron Sputtering. Chin. Phys. Lett., 2016, 33(06): 66802-066802.
2016, Vol. 33 
