1Institute of Microelectronics, Chinese Academy of Sciences, Beijing 100083 2Key Laboratory of Optoelectronics Technology (Ministry of Education), Beijing University of Technology, Beijing 100124
Abstract：Beam steering in implant defined coherently coupled vertical cavity surface emitting laser (VCSEL) arrays is simulated using the FDTD solution software. Angular deflection dependent on relative phase differences among elements, inter-element spacing, element size and emitted wavelength is analyzed detailedly and systematically. We design and fabricate 1$\times$2 implant defined VCSEL arrays for optimum beam steering performance. Electronically controlled beam steering with a maximum deflection angle of 1.6$^{\circ}$ is successfully achieved in the 1$\times$2 VCSEL arrays. The percentage of the power in the central lobe is above 39% when steering. The results show that the steering is controllable. Compared with other beam steering methods, the fabrication process is simple and of low cost.
Kozhenikov M, Basavanhally N R, Weld J D, Low Y L, Kolodner P, Bolle C A, Ryf R, Papazian A R, Olkhovets A, Pardo F, Kim J, Neilson D T, Aksyuk V A and Gates J V 2003 IEEE Photon. Technol. Lett.15 993
2018, Vol. 35 
