摘要We develop a new cavity with a mode similar to TE13 to produce microwave plasma, named APMPS II, which is able to produce a mass of air plasma with diameter of around 6cm, equipped with about 3kW input power under one atmosphere. The plasma seems to be homogeneous without significant filamentous discharge as observed by common camera device. We present the theory of this cavity, show the distribution of electric field of several planes inside the cavity and give some experimental results.
Abstract:We develop a new cavity with a mode similar to TE13 to produce microwave plasma, named APMPS II, which is able to produce a mass of air plasma with diameter of around 6cm, equipped with about 3kW input power under one atmosphere. The plasma seems to be homogeneous without significant filamentous discharge as observed by common camera device. We present the theory of this cavity, show the distribution of electric field of several planes inside the cavity and give some experimental results.
(Plasma heating by microwaves; ECR, LH, collisional heating)
引用本文:
LIU Liang;ZHANG Gui-Xin;FENG Jian;WANG Xin-Xin;LUO Cheng-Mu. A Microwave Air Plasma Source under Atmospheric Pressure[J]. 中国物理快报, 2008, 25(3): 1019-1021.
LIU Liang, ZHANG Gui-Xin, FENG Jian, WANG Xin-Xin, LUO Cheng-Mu. A Microwave Air Plasma Source under Atmospheric Pressure. Chin. Phys. Lett., 2008, 25(3): 1019-1021.
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