Improvement of Uniformity of Inductively Coupled Plasma with a one Spiral Antenna

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摘要 Uniformity of inductively coupled plasma (ICP) is improved with a cone spiral antenna in our experiment. Performance of the ICP with a new type of antenna is experimentally investigated. The results indicate that the uniformity of plasma density in the radial direction is obviously improved as compared to the ICP with a planar spiral antenna. Performance of ICP is analysed with the experimental results.

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	作者相关文章
	LI Lin-Sen
	XU Xu
	LIU Feng
	ZHOU Qian-Hong
	NIE Zong-Fu
	LIANG Yi-Zi
	LIANG Rong-Qing

Abstract：Uniformity of inductively coupled plasma (ICP) is improved with a cone spiral antenna in our experiment. Performance of the ICP with a new type of antenna is experimentally investigated. The results indicate that the uniformity of plasma density in the radial direction is obviously improved as compared to the ICP with a planar spiral antenna. Performance of ICP is analysed with the experimental results.

Key words： 52.35.Hr 52.50.Dg

收稿日期: 2007-12-19 出版日期: 2008-05-31

:	52.35.Hr	(Electromagnetic waves (e.g., electron-cyclotron, Whistler, Bernstein, upper hybrid, lower hybrid))
	52.50.Dg	(Plasma sources)

引用本文:

LI Lin-Sen;XU Xu;LIU Feng;ZHOU Qian-Hong;NIE Zong-Fu;LIANG Yi-Zi;LIANG Rong-Qing. Improvement of Uniformity of Inductively Coupled Plasma with a one Spiral Antenna[J]. 中国物理快报, 2008, 25(6): 2144-2146.
LI Lin-Sen, XU Xu, LIU Feng, ZHOU Qian-Hong, NIE Zong-Fu, LIANG Yi-Zi, LIANG Rong-Qing. Improvement of Uniformity of Inductively Coupled Plasma with a one Spiral Antenna. Chin. Phys. Lett., 2008, 25(6): 2144-2146.

链接本文:

https://cpl.iphy.ac.cn/CN/ 或 https://cpl.iphy.ac.cn/CN/Y2008/V25/I6/2144

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