Spectroscopic Diagnostics of Atmospheric Argon Microwave Plasma Based on an Inductive Coupling Window-Rectangular Resonator
WANG Zhong** , ZHANG Gui-Xin, LIU Cheng, JIA Zhi-Dong
Department of Electrical Engineering, Tsinghua University, Beijing 100084
Abstract ：We present a novel microwave plasma source based on an inductive coupling window-rectangular resonator. A definite volume of atmospheric argon microwave plasma is excited in the source under the input of several kilowatts of microwave power operating at 2.45 GHz. The excitation temperature and electron temperature of the argon plasma are separately researched by using Boltzmann plot and line-to continuum intensity ratio of Ar I spectral lines. Its electron density is inferred from the Stark broadening of the Hβ line at 486.13 nm.
出版日期: 2014-04-24
:
52.80.Pi
(High-frequency and RF discharges)
52.50.Dg
(Plasma sources)
52.70.Kz
(Optical (ultraviolet, visible, infrared) measurements)
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2014, Vol. 31 
