摘要Dynamic characteristics of atomic force microscopy (AFM) cantilevers can be influenced by their working media. We perform an experimental study on the resonant responses of rectangular AFM cantilevers with different sizes immersed in various viscous fluids. The measured resonance frequencies in liquids are used to validate several theoretical models. Comparison shows the analytical model proposed by Sader [J. Appl. Phys. 84 (1998) 64] can give the best agreement with the experimental results with the maximum relative error nearly 16% for all the cantilevers in different liquids. The ratio between the resonant frequencies in air and water is almost independent of the cantilever length, which is consistent with the theoretical analyses.
Abstract：Dynamic characteristics of atomic force microscopy (AFM) cantilevers can be influenced by their working media. We perform an experimental study on the resonant responses of rectangular AFM cantilevers with different sizes immersed in various viscous fluids. The measured resonance frequencies in liquids are used to validate several theoretical models. Comparison shows the analytical model proposed by Sader [J. Appl. Phys. 84 (1998) 64] can give the best agreement with the experimental results with the maximum relative error nearly 16% for all the cantilevers in different liquids. The ratio between the resonant frequencies in air and water is almost independent of the cantilever length, which is consistent with the theoretical analyses.
[1] Garci a R and Perez R 2002 Surf. Sci. Rep. 47 197 [2] Hansma P K et al 1994 Appl. Phys. Lett. 64 1738 [3] Putman C A J et al 1994 Appl. Phys. Lett. 64 2454 [4] Wei Z and Zhao Y P 2004 Chin. Phys. Lett. 21 616 [5] Doktycz M J et al 2003 Ultramicroscopy 97 209 [6] Sader J E 1998 J. Appl. Phys. 84 64 [7] Chon J W M, Mulvaney P and Sader J E 2000 J. Appl. Phys. 87 3978 [8] Legleiter J and Kowalewski T 2005 Appl. Phys. Lett. 87163120 [9] Bergaud C and Nicu L 2000 Rev. Sci. Instrum. 71 2487 [10] Hirai Y et al 1998 Microprocesses and NanotechnologyConf. (Kjungju, Korea) p 89 [11] Scuor N et al 2006 Meas. Sci. Technol. 17 173
2007, Vol. 24 
