Effects of Alcohol Addition on the Deposition of Diamond Thick Films by dc Plasma Chemical Vapor Deposition Method
BAI Yi-zhen, JIANG Zhi-gang, WANG Chun-lei, JIN Zeng-sun, LÜ Xian-yi, ZOU Guang-tian
National Laboratory of Superhard Materials, Jilin University, Changchun 130023
Effects of Alcohol Addition on the Deposition of Diamond Thick Films by dc Plasma Chemical Vapor Deposition Method
BAI Yi-zhen;JIANG Zhi-gang;WANG Chun-lei;JIN Zeng-sun;LÜ Xian-yi;ZOU Guang-tian
National Laboratory of Superhard Materials, Jilin University, Changchun 130023
关键词 ：
81.15.Gh ,
68.55.Jk
Abstract ： Diamond films have been deposited by dc plasma chemical vapor deposition method. The addition of alcohol in the resource gas largely increases the deposition rate. The effects of alcohol addition on deposition rate and film quality are analyzed by scanning electron microscopy and Raman spectrometry. The mechanism of experimental phenomena is discussed.
Key words ：
81.15.Gh
68.55.Jk
出版日期: 1998-03-01
:
81.15.Gh
(Chemical vapor deposition (including plasma-enhanced CVD, MOCVD, ALD, etc.))
68.55.Jk
引用本文:
BAI Yi-zhen;JIANG Zhi-gang;WANG Chun-lei;JIN Zeng-sun;LÜXian-yi;ZOU Guang-tian. Effects of Alcohol Addition on the Deposition of Diamond Thick Films by dc Plasma Chemical Vapor Deposition Method[J]. 中国物理快报, 1998, 15(3): 228-229.
链接本文:
https://cpl.iphy.ac.cn/CN/
或
https://cpl.iphy.ac.cn/CN/Y1998/V15/I3/228
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1998, Vol. 15 
