A Micromachined SiO2 /Silicon Probe for Neural Signal Recordings
SUI Xiao-Hong, PEI Wei-Hua, ZHANG Ruo-Xin, LU Lin, CHEN Hong-Da
State Key Laboratory on Integrated Optoelectronics, Institute of Semiconductors, Chinese Academy of Sciences, Beijing 100083
A Micromachined SiO2 /Silicon Probe for Neural Signal Recordings
SUI Xiao-Hong;PEI Wei-Hua;ZHANG Ruo-Xin;LU Lin;CHEN Hong-Da
State Key Laboratory on Integrated Optoelectronics, Institute of Semiconductors, Chinese Academy of Sciences, Beijing 100083
关键词 ：
84.37.+q ,
07.07.Df ,
68.55.Jk
Abstract ： The development of an implantable five channel microelectrode array is presented for neural signal recordings. The detailed fabrication process is outlined with four masks used. The SEM images show that the probe shank is 1.2mm long, 100μm wide and 30μm thick with the recording sites spaced 200μm apart for good signal isolation. The plot of the single recording site impedance versus frequency is shown by test in vitro and the impedance declines with the increasing frequency. Experiment in vivo using this probe is under way.
Key words ：
84.37.+q
07.07.Df
68.55.Jk
出版日期: 2006-07-01
:
84.37.+q
(Measurements in electric variables (including voltage, current, resistance, capacitance, inductance, impedance, and admittance, etc.))
07.07.Df
(Sensors (chemical, optical, electrical, movement, gas, etc.); remote sensing)
68.55.Jk
引用本文:
SUI Xiao-Hong;PEI Wei-Hua;ZHANG Ruo-Xin;LU Lin;CHEN Hong-Da. A Micromachined SiO2 /Silicon Probe for Neural Signal Recordings[J]. 中国物理快报, 2006, 23(7): 1932-1934.
2 /Silicon Probe for Neural Signal Recordings. Chin. Phys. Lett., 2006, 23(7): 1932-1934.
链接本文:
https://cpl.iphy.ac.cn/CN/
或
https://cpl.iphy.ac.cn/CN/Y2006/V23/I7/1932
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