A Novel Analytical Approach for Multi-Layer Diaphragm-Based Optical Microelectromechanical-System Pressure Sensors
LI Ming1, WANG Ming1, RONG Hua1, LI Hong-Pu2
1Key Laboratory of Opto-Electronic Technology, School of Physical Science and Technology, Nanjing Normal University, Nanjing 210097
2Department of Electrical and Electronics Engineering, Shizuoka University, Hamamatsu, 432-8501, Japan
A Novel Analytical Approach for Multi-Layer Diaphragm-Based Optical Microelectromechanical-System Pressure Sensors
LI Ming1;WANG Ming1;RONG Hua1;LI Hong-Pu2
1Key Laboratory of Opto-Electronic Technology, School of Physical Science and Technology, Nanjing Normal University, Nanjing 210097
2Department of Electrical and Electronics Engineering, Shizuoka University, Hamamatsu, 432-8501, Japan
Abstract： An optical microelectromechanical-system (MEMS) pressure sensor based on multi-layer circular diaphragm is described and analysed by using the proposed novel analytical approach and the traditional transfer matrix method. The analytical expressions of the deflection of multi-layer diaphragm and absolute optical reflectance are derived respectively. The influence of residual stress on the deflection of diaphragm is also analysed. Simulation results given by the finite element method are consistent with the ones which are analysed by using the analytical approach. The analytical approach will be helpful to design and fabricate the optical MEMS pressure sensors with multi-layer diaphragm based on Fabry--Perot interferometry.
LI Ming;WANG Ming;RONG Hua;LI Hong-Pu. A Novel Analytical Approach for Multi-Layer Diaphragm-Based Optical Microelectromechanical-System Pressure Sensors[J]. 中国物理快报, 2006, 23(5): 1211-1214.
LI Ming, WANG Ming, RONG Hua, LI Hong-Pu. A Novel Analytical Approach for Multi-Layer Diaphragm-Based Optical Microelectromechanical-System Pressure Sensors. Chin. Phys. Lett., 2006, 23(5): 1211-1214.
2006, Vol. 23 
