Inner Surface Modification of a Tube by Magnetic Glow-Arc Plasma Source Ion Implantation
ZHANG Gu-Ling1,2, WANG Jiu-Li2, WU Xing-Fang1, FENG Wen-Ran2, CHEN Guang-Liang2, GU Wei-Chao2, NIU Er-Wu2, FAN Song-Hua2, LIU Chi-Zi2, YANG Si-Ze2
1School of Materials Science and Engineering, University of Science and Technology Beijing, Beijing 100083
2Beijing National Laboratory for Condensed Matter Physics and Institute of Physics, Chinese Academy of Sciences, Beijing 100080
Inner Surface Modification of a Tube by Magnetic Glow-Arc Plasma Source Ion Implantation
1School of Materials Science and Engineering, University of Science and Technology Beijing, Beijing 100083
2Beijing National Laboratory for Condensed Matter Physics and Institute of Physics, Chinese Academy of Sciences, Beijing 100080
Abstract： A new method named the magnetic glow-arc plasma source ion implantation (MGA-PSII) is proposed for inner surface modification of tubes. In MGA-PSII, under the control of an axial magnetic field, which is generated by an electric coil around the tube sample, glow arc plasma moves spirally into the tube from its two ends. A negative voltage applied on the tube realized its inner surface implantation. Titanium nitride (TiN) films are prepared on the inner surface of a stainless steel tube in diameter 90mm and length 600mm. Hardness tests show that the hardness at the tube centre is up to 20GPa. XRD, XPS and AES analyses demonstrate that good quality of TiN films can be achieved.
ZHANG Gu-Ling;WANG Jiu-Li;WU Xing-Fang;FENG Wen-Ran;CHEN Guang-Liang;GU Wei-Chao;NIU Er-Wu;FAN Song-Hua;LIU Chi-Zi;YANG Si-Ze. Inner Surface Modification of a Tube by Magnetic Glow-Arc Plasma Source Ion Implantation[J]. 中国物理快报, 2006, 23(5): 1241-1244.
ZHANG Gu-Ling, WANG Jiu-Li, WU Xing-Fang, FENG Wen-Ran, CHEN Guang-Liang, GU Wei-Chao, NIU Er-Wu, FAN Song-Hua, LIU Chi-Zi, YANG Si-Ze. Inner Surface Modification of a Tube by Magnetic Glow-Arc Plasma Source Ion Implantation. Chin. Phys. Lett., 2006, 23(5): 1241-1244.
2006, Vol. 23 
