| CONDENSED MATTER: ELECTRONIC STRUCTURE, ELECTRICAL, MAGNETIC, AND OPTICAL PROPERTIES |
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Precise, Long-Time Displacement Self-Sensing of Piezoelectric Cantilever Actuators Based on Charge Measurement Using the Sawyer–Tower Circuit |
| Qiang-zhong Wang1, Gang Wang1, Fa-xin Li1,2** |
1LTCS and College of Engineering, Peking University, Beijing 100871
2Center for Applied Physics and Technology, Peking University, Beijing 100871
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| Cite this article: |
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Qiang-zhong Wang, Gang Wang, Fa-xin Li 2018 Chin. Phys. Lett. 35 107701 |
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Abstract Previous studies show that near linearity exists between displacement and charge of piezoelectric actuators, while studies under higher fields are lacking and long-time displacement self-sensing is still a challenge. Here we indicate that precise, long-time displacement self-sensing can be accomplished using the Sawyer–Tower circuit, where a high-impedance electrometer and a non-leaky capacitor are used to measure the charge. Calibrating the results on a piezoelectric unimorph cantilever shows that the displacement resolution of charge self-sensing is $\sim$3 nm, much better than that of $\sim$40 nm for the calibrating laser sensor. Testing results under a unipolar field up to 2 kV/mm with different periods indicate that a direct proportional relationship holds between charge and displacement with the maximum error of 4.65%. The self-sensing time can be over 20 min or even longer if a higher-impedance electrometer is used.
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Received: 20 June 2018
Published: 15 September 2018
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| PACS: |
77.22.Ej
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(Polarization and depolarization)
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77.65.-j
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(Piezoelectricity and electromechanical effects)
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77.80.Dj
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(Domain structure; hysteresis)
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77.80.Fm
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(Switching phenomena)
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77.84.-s
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(Dielectric, piezoelectric, ferroelectric, and antiferroelectric materials)
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| Fund: Supported by the National Natural Science Foundation of China under Grant No 11521202. |
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