| FUNDAMENTAL AREAS OF PHENOMENOLOGY(INCLUDING APPLICATIONS) |
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Design and Characterization of a Top Cladding for Silicon-on-Insulator Grating Coupler |
| Nemkova Anastasia, XIAO Xi, YANG Biao, CHU Tao, YU Jin-Zhong, YU Yu-De** |
State Key Laboratory on Integrated Optoelectronics, Institute of Semiconductors, Chinese Academy of Sciences, Beijing 100083
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Nemkova Anastasia, XIAO Xi, YANG Biao et al 2012 Chin. Phys. Lett. 29 114213 |
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Abstract An effective top cladding for silicon-on-insulator grating coupler is designed and the validity of the design is confirmed experimentally. The proposed double-layer silicon oxide/silicon nitride (SiO2/Si3N4) cladding demonstrates antireflection properties and affects a coupling strength of the grating structure. A coupling efficiency of 65% is obtained after cladding layer deposition.
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Received: 07 September 2012
Published: 28 November 2012
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