Original Articles |
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Effects of Processing Parameters on Microstructure and Properties of Nanoscale ZrC/ZrB2 Multilayered Coatings |
YANG Jin;ZHANG Xue-Hua;CAO Meng;WANG Ming-Xia;LIANG Jin-Ling;LI De-Jun |
College of Physics and Electronic Information Science, Tianjin Normal University, Tianjin 300074 |
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Cite this article: |
YANG Jin, ZHANG Xue-Hua, CAO Meng et al 2006 Chin. Phys. Lett. 23 2838-2840 |
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Abstract ZrC/ZrB2 multilayered coatings with bilayer periods of 3.5--40nm are synthesized by rf magnetron sputtering. Analyses of x-ray diffraction, scanning electron microscopy and nanoindentation indicate that multilayered coatings possess much higher hardness and greater fracture resistance than monolithic ZrC and ZrB2 coatings. A maximum hardness (41.7GPa) and a critical fracture load (73.7mN) are observed in the multilayer with La=32nm deposited at the substrate bias -40V. Higher residual stress built in the ZrC layer can be released by periodic insertion of ZrB2 into the ZrC layer. A clear multilayered structure with mixed ZrB2 (001), ZrB2 (002) and ZrC (111) orientations should be responsible for the enhanced mechanical properties.
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Keywords:
68.65.Ac
81.15.Cd
81.65.Lp
81.65.Lp
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Published: 01 October 2006
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PACS: |
68.65.Ac
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(Multilayers)
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81.15.Cd
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(Deposition by sputtering)
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81.65.Lp
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(Surface hardening: nitridation, carburization, carbonitridation ?)
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81.65.Lp
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(Surface hardening: nitridation, carburization, carbonitridation ?)
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