Effects of Processing Parameters on Microstructure and Properties of Nanoscale ZrC/ZrB<suB>2</suB> Multilayered Coatings

Chin. Phys. Lett.

2006, Vol. 23

Issue (10): 2838-2840 DOI:

Original Articles

Effects of Processing Parameters on Microstructure and Properties of Nanoscale ZrC/ZrB₂ Multilayered Coatings

YANG Jin;ZHANG Xue-Hua;CAO Meng;WANG Ming-Xia;LIANG Jin-Ling;LI De-Jun

College of Physics and Electronic Information Science, Tianjin Normal University, Tianjin 300074

Cite this article:

YANG Jin, ZHANG Xue-Hua, CAO Meng et al 2006 Chin. Phys. Lett. 23 2838-2840

Download: PDF(313KB)
Export: BibTeX | EndNote | Reference Manager | ProCite | RefWorks

Abstract ZrC/ZrB₂ multilayered coatings with bilayer periods of 3.5--40nm are synthesized by rf magnetron sputtering. Analyses of x-ray diffraction, scanning electron microscopy and nanoindentation indicate that multilayered coatings possess much higher hardness and greater fracture resistance than monolithic ZrC and ZrB₂ coatings. A maximum hardness (41.7GPa) and a critical fracture load (73.7mN) are observed in the multilayer with La=32nm deposited at the substrate bias -40V. Higher residual stress built in the ZrC layer can be released by periodic insertion of ZrB₂ into the ZrC layer. A clear multilayered structure with mixed ZrB₂ (001), ZrB₂ (002) and ZrC (111) orientations should be responsible for the enhanced mechanical properties.

Keywords: 68.65.Ac 81.15.Cd 81.65.Lp 81.65.Lp

Published: 01 October 2006

PACS:	68.65.Ac	(Multilayers)
	81.15.Cd	(Deposition by sputtering)
	81.65.Lp	(Surface hardening: nitridation, carburization, carbonitridation ?)
	81.65.Lp	(Surface hardening: nitridation, carburization, carbonitridation ?)

TRENDMD:

URL:

https://cpl.iphy.ac.cn/ OR https://cpl.iphy.ac.cn/Y2006/V23/I10/02838

Service
	E-mail this article
	E-mail Alert
	RSS
Articles by authors
	YANG Jin
	ZHANG Xue-Hua
	CAO Meng
	WANG Ming-Xia
	LIANG Jin-Ling
	LI De-Jun

Related articles from Frontiers Journals

[1]	WAN Qi-Jian, FENG Jie, GUO Gang. Crystallization Characteristics of SiN_x-Doped SbTe Films for Phase Change Memory[J]. Chin. Phys. Lett., 2012, 29(3): 2838-2840
[2]	ZHU Yun, WANG Yue, WAN Peng-Fei, LI Hong-Yu, WANG Shou-Yu. Optical and Mechanical Properties of Transparent Conductive Al-Doped ZnO Films Deposited by the Sputtering Method[J]. Chin. Phys. Lett., 2012, 29(3): 2838-2840
[3]	LI Shao-Juan, HE Xin, HAN De-Dong, SUN Lei, WANG Yi, HAN Ru-Qi, CHAN Man-Sun, ZHANG Sheng-Dong, . Reactive Radiofrequency Sputtering-Deposited Nanocrystalline ZnO Thin-Film Transistors**[J]. Chin. Phys. Lett., 2012, 29(1): 2838-2840
[4]	WU Wen-Juan, WANG Zhan-Shan, ZHU Jing-Tao, ZHANG Zhong, WANG Feng-Li, CHEN Ling-Yan, ZHOU Hong-Jun, HUO Tong-Lin . Spectral Resolution Improvement of Mo/Si Multilayers**[J]. Chin. Phys. Lett., 2011, 28(8): 2838-2840
[5]	CHEN San, , Lu Hong-Yan, CHEN Kun-Ji, XU Jun, MA Zhong-Yuan, LI Wei, HUANG Xin-Fan . Two-Dimensional Cavity Resonant Modes of Si Based Bragg Reflection Ridge Waveguide[J]. Chin. Phys. Lett., 2011, 28(6): 2838-2840
[6]	WANG Xiao, JIANG Zui-Min, XU Fei, , MA Zhong-Quan, XU Run, YU Bin, LI Ming-Zhu, ZHENG Ling-Ling, FAN Yong-Liang, HUANG Jian, LU Fang . Enhancement of Er³⁺ Emission from an Er−Si Codoped Al₂O₃ Film by Stacking Si−Doped Al₂O₃ Sublayers**[J]. Chin. Phys. Lett., 2011, 28(12): 2838-2840
[7]	HUANG Hai-Qin, SUN Jian, LIU Feng-Juan, ZHAO Jian-Wei, HU Zuo-Fu, LI Zhen-Jun, ZHANG Xi-Qing, WANG Yong-Sheng . Characteristics and Time-Dependent Instability of Ga-Doped ZnO Thin Film Transistor Fabricated by Radio Frequency Magnetron Sputtering**[J]. Chin. Phys. Lett., 2011, 28(12): 2838-2840
[8]	XU Jia-Xiong, YAO Ruo-He, LIU Yu-Rong . Fabrication of a ZnO:Al/Amorphous-FeSi₂ Heterojunction at Room Temperature*[J]. Chin. Phys. Lett., 2011, 28(10): 2838-2840
[9]	LI Na, YUE Chong-Xing, LI Xu-Xin . Neutrino-Electron Scattering and the Little Higgs Models**[J]. Chin. Phys. Lett., 2011, 28(10): 2838-2840
[10]	YAN Chang, LIU Fang-Yang, LAI Yan-Qing, LI Jie, LIU Ye-Xiang . Cu₂Si_xSn_1−xS₃ Thin Films Prepared by Reactive Magnetron Sputtering For Low-Cost Thin Film Solar Cells**[J]. Chin. Phys. Lett., 2011, 28(10): 2838-2840
[11]	FAN Ping, ZHENG Zhuang-Hao, LIANG Guang-Xing, CAI Xing-Min, ZHANG Dong-Ping. Composition-Dependent Characterization of Sb₂Te₃ Thin Films Prepared by Ion Beam Sputtering Deposition[J]. Chin. Phys. Lett., 2010, 27(8): 2838-2840
[12]	LIU Na, WANG Ying-Jian, ZHOU Ming, JING Xu-Feng, WANG Yan-Zhi, CUI Yun, JIN Yun-Xia. Laser Resistance of Ta₂O₅/SiO₂ and ZrO₂/SiO₂ Optical Coatings under 2μm Femtosecond Pulsed Irradiation[J]. Chin. Phys. Lett., 2010, 27(7): 2838-2840
[13]	YOU Feng, WANG Zheng, XIE Qing-Lian, JI Lu, YUE Hong-Wei, ZHAO Xin-Jie, FANG Lan, YAN Shao-Lin. Fabrication and Properties of Double-Side Tl2Ba₂CaCu₂O₈ Thin Film on CeO₂ Buffered Sapphire Substrate[J]. Chin. Phys. Lett., 2010, 27(4): 2838-2840
[14]	FAN Ping, LIANG Guang-Xing, ZHENG Zhuang-Hao, CAI Xing-Min, ZHANG Dong-Ping. Growth and Characterization of CIS Thin Films Prepared by Ion Beam Sputtering Deposition[J]. Chin. Phys. Lett., 2010, 27(4): 2838-2840
[15]	XUE Cheng-Shan, LIU Wen-Jun, SHI Feng, ZHUANG Hui-Zhao, GUO Yong-Fu, CAO Yu-Ping, SUN Hai-Bo. Fabrication of Mn-Doped GaN Nanobars[J]. Chin. Phys. Lett., 2010, 27(3): 2838-2840

Viewed

Full text

Abstract