A Back-Gated Ferroelectric Field-Effect Transistor with an Al-Doped Zinc Oxide Channel
JIA Ze1** , XU Jian-Long2 , WU Xiao1 , ZHANG Ming-Ming2 , LIOU Juin-J.3
1 School of Microelectronics and Solid-State Electronics, University of Electronic Science and Technology of China, Chengdu 6100542 Institute of Microelectronics, Tsinghua National Laboratory for Information Science and Technology, Tsinghua University, Beijing 1000843 Department of Electrical Engineering and Computer Science, University of Central Florida, Orlando 32816, USA
Abstract ：We report a back-gated metal-oxide-ferroelectric-metal (MOFM) field-effect transistor (FET) with lead zirconate titanate (PZT) material, in which an Al doped zinc oxide (AZO) channel layer with an optimized doping concentration of 1% is applied to reduce the channel resistance of the channel layer, thus guaranteeing a large enough load capacity of the transistor. The hysteresis loops of the Pt/PZT/AZO/Ti/Pt capacitor are measured and compared with a Pt/PZT/Pt capacitor, indicating that the remnant polarization is almost 40 μC/cm2 and the polarization is saturated at 20 V. The measured capacitance-voltage properties are analyzed as a result of the electron depletion and accumulation switching operation conducted by the modulation of PZT on AZO channel resistance caused by the switchable remnant polarization of PZT. The switching properties of the AZO channel layer are also proved by the current-voltage transfer curves measured in the back-gated MOFM ferroelectric FET, which also show a drain current switching ratio up to about 100 times.
出版日期: 2015-01-20
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2015, Vol. 32 
