Electromechanical Properties of Microcantilever Actuated by Enhanced Piezoelectric PZT Thick Film
LIU Hong-Mei1,3, ZHAO Quan-Liang2, CAO Mao-Sheng1,2, YUAN Jie4, DUAN Zhong-Xia2, QIU Cheng-Jun 2,3
1School of Materials Science and Chemistry, Harbin Engineering University, Harbin 1500012School of Materials Science and Engineering, Beijing Institute of Technology, Beijing 1000813Key Laboratory of Integrated Circuit, Heilongjiang University, Harbin 1500804School of Information Engineering, Central University for Nationalities, Beijing 100081
Electromechanical Properties of Microcantilever Actuated by Enhanced Piezoelectric PZT Thick Film
LIU Hong-Mei1,3, ZHAO Quan-Liang2, CAO Mao-Sheng1,2, YUAN Jie4, DUAN Zhong-Xia2, QIU Cheng-Jun 2,3
1School of Materials Science and Chemistry, Harbin Engineering University, Harbin 1500012School of Materials Science and Engineering, Beijing Institute of Technology, Beijing 1000813Key Laboratory of Integrated Circuit, Heilongjiang University, Harbin 1500804School of Information Engineering, Central University for Nationalities, Beijing 100081
摘要Pb(Zr0.53,Ti0.47)O3 (PZT) films with thicknesses of 0.8μm, 2μm and 4μm are prepared by a sol-gel method and their longitudinal piezoelectric coefficients are analysed. The results show that the PZT thick films, whose density is closer to bulk PZT, has the better crystallization, with d33 and density much larger than those of PZT thin films. A piezoelectric microcantilever actuated by a 4-μm-thick PZT film is fabricated and its displacement is measured in different frequencies and voltages. The displacement increases linearly with the increasing bias, and the maximum displacement of 0.544μm is observed at 30kHz for 5V bias. The resonant frequency obtained in the experiment matches quite well with the theoretical result, and it is shown that the resonant frequency of PZT microcantilever could be controlled and predicated.
Abstract：Pb(Zr0.53,Ti0.47)O3 (PZT) films with thicknesses of 0.8μm, 2μm and 4μm are prepared by a sol-gel method and their longitudinal piezoelectric coefficients are analysed. The results show that the PZT thick films, whose density is closer to bulk PZT, has the better crystallization, with d33 and density much larger than those of PZT thin films. A piezoelectric microcantilever actuated by a 4-μm-thick PZT film is fabricated and its displacement is measured in different frequencies and voltages. The displacement increases linearly with the increasing bias, and the maximum displacement of 0.544μm is observed at 30kHz for 5V bias. The resonant frequency obtained in the experiment matches quite well with the theoretical result, and it is shown that the resonant frequency of PZT microcantilever could be controlled and predicated.
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2008, Vol. 25 
