中国物理快报  2014, Vol. 31 Issue (07): 77702-077702    DOI: 10.1088/0256-307X/31/7/077702
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Influence of Rapid Thermal Annealing on the Structure and Electrical Properties of Ce-Doped HfO2 Gate Dielectric
MENG Yong-Qiang, LIU Zheng-Tang, FENG Li-Ping**, CHEN Shuai
State Key Lab of Solidification Processing, College of Materials Science and Engineering, Northwestern Polytechnical University, Xi'an 710072