摘要Semi-polar ZnO (1011) epitaxial films are demonstrated using a methanol oxidant by metalorganic chemical vapor deposition on Si (111) substrates at 500°C. X−ray φ scanning indicates that there are six kinds of in−plane domain growths, with the ZnO [1012] parallel to the Si 〈112〉 direction families. The crystallographic orientation of ZnO is supposed to be caused by surface passivation. The methanol, as a polar molecule, may be adsorbed on the Si (111) surface to form a passivation layer, which inhibits the (0001) ZnO plane deposition on the substrate surface, and as a result the ZnO (1011) plane becomes preferred. The optical properties, examined by a room−temperature photoluminescence spectrum, exhibit a strong near-band-edge emission peak at 379 nm, indicating that the (1011) ZnO film has good crystal quality. These results are significant for research into and for the applications of semi-polar ZnO films.
Abstract：Semi-polar ZnO (1011) epitaxial films are demonstrated using a methanol oxidant by metalorganic chemical vapor deposition on Si (111) substrates at 500°C. X−ray φ scanning indicates that there are six kinds of in−plane domain growths, with the ZnO [1012] parallel to the Si 〈112〉 direction families. The crystallographic orientation of ZnO is supposed to be caused by surface passivation. The methanol, as a polar molecule, may be adsorbed on the Si (111) surface to form a passivation layer, which inhibits the (0001) ZnO plane deposition on the substrate surface, and as a result the ZnO (1011) plane becomes preferred. The optical properties, examined by a room−temperature photoluminescence spectrum, exhibit a strong near-band-edge emission peak at 379 nm, indicating that the (1011) ZnO film has good crystal quality. These results are significant for research into and for the applications of semi-polar ZnO films.
SANG Ling**;WANG Jun**;SHI Kai;WEI Hong-Yuan;JIAO Chun-Mei;LIU Xiang-Lin;YANG Shao-Yan;ZHU Qin-Sheng;WANG Zhan-Guo. The Growth of Semi-Polar ZnO (10SANG Ling**, WANG Jun**, SHI Kai, WEI Hong-Yuan, JIAO Chun-Mei, LIU Xiang-Lin, YANG Shao-Yan, ZHU Qin-Sheng, WANG Zhan-Guo. The Growth of Semi-Polar ZnO (10
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2012, Vol. 29 
