摘要Surface change of gallium nitride specimens after bombardment by highly charged Pbq+-ions (q=25, 35) at room temperature is studied by means of atomic force microscopy. The experimental results reveal that the surface of GaN specimens is significantly etched and erased. An unambiguous step-up is observed. The erosion depth not only strongly depends on the charge state of ions, but also is related to the incident angle of Pbq+-ions and the ion dose. The erosion depth of the specimens in 60°incidence (tilted incidence) is significantly deeper than that of the normal incidence. The erosion behaviour of specimens has little dependence on the kinetic energy of ion (Ek=360, 700keV). On the other hand, surface roughness of the irradiated area is obviously decreased due to erosion compared with the un-irradiated area. A flat terrace is formed.
Abstract：Surface change of gallium nitride specimens after bombardment by highly charged Pbq+-ions (q=25, 35) at room temperature is studied by means of atomic force microscopy. The experimental results reveal that the surface of GaN specimens is significantly etched and erased. An unambiguous step-up is observed. The erosion depth not only strongly depends on the charge state of ions, but also is related to the incident angle of Pbq+-ions and the ion dose. The erosion depth of the specimens in 60°incidence (tilted incidence) is significantly deeper than that of the normal incidence. The erosion behaviour of specimens has little dependence on the kinetic energy of ion (Ek=360, 700keV). On the other hand, surface roughness of the irradiated area is obviously decreased due to erosion compared with the un-irradiated area. A flat terrace is formed.
(Direct observation of dislocations and other defects (etch pits, decoration, electron microscopy, x-ray topography, etc.))
引用本文:
ZHANG Li-Qing;ZHANG Chong-Hong;YANG Yi-Tao;YAO Cun-Feng;LI Bing-Sheng;JIN Yun-Fan;SUN You-Mei;SONG Shu-Jian. Surface Erosion of GaN Bombarded by Highly Charged 208Pbq+-Ions[J]. 中国物理快报, 2008, 25(7): 2670-2673.
ZHANG Li-Qing, ZHANG Chong-Hong, YANG Yi-Tao, YAO Cun-Feng, LI Bing-Sheng, JIN Yun-Fan, SUN You-Mei, SONG Shu-Jian. Surface Erosion of GaN Bombarded by Highly Charged 208Pbq+-Ions. Chin. Phys. Lett., 2008, 25(7): 2670-2673.
2008, Vol. 25 
