中国物理快报  2009, Vol. 26 Issue (4): 46801-046801    DOI: 10.1088/0256-307X/26/4/046801
  CONDENSED MATTER: STRUCTURE, MECHANICAL AND THERMAL PROPERTIES 本期目录 | 过刊浏览 | 高级检索 |
Fabrication and Characterization of Si Nanocrystals Synthesized by Electron Beam Evaporation of Si and SiO2 Mixture
LI Wei-Long, JIA Rui, LIU Ming, CHEN Chen, XIE Chang-Qing, ZHU Chen-Xin, LI Hao-Feng, ZHANG Pei-Wen, YE Tian-Chun
Key Laboratory of Nanofabrication and Novel Devices Integrated Technology, Institute of Microelectronics, Chinese Academy of Sciences, Beijing 100029
Fabrication and Characterization of Si Nanocrystals Synthesized by Electron Beam Evaporation of Si and SiO2 Mixture
LI Wei-Long, JIA Rui, LIU Ming, CHEN Chen, XIE Chang-Qing, ZHU Chen-Xin, LI Hao-Feng, ZHANG Pei-Wen, YE Tian-Chun
Key Laboratory of Nanofabrication and Novel Devices Integrated Technology, Institute of Microelectronics, Chinese Academy of Sciences, Beijing 100029