Amorphous Hydrogenated Carbon-Nitrogen Alloy Thin
Films for Solar Cell Application
ZHOU Zhi-Bin1 , DING Zheng-Ming2 , PANG Qian-Jun1 , CUI Rong-Qiang1
1 Department of Physics, 2 Centre of Physical and Chemical Analysis, Shanghai Jiao Tong University, Shanghai 200030
Amorphous Hydrogenated Carbon-Nitrogen Alloy Thin
Films for Solar Cell Application
ZHOU Zhi-Bin1 ;DING Zheng-Ming2 ;PANG Qian-Jun1 ;CUI Rong-Qiang1
1 Department of Physics, 2 Centre of Physical and Chemical Analysis, Shanghai Jiao Tong University, Shanghai 200030
关键词 ：
61.43.Dq ,
81.15.Cd ,
84.60.Jt
Abstract ： Amorphous hydrogenated carbon-nitrogen alloy (a-CNx :H) thin films have been deposited on silicon substrates by an improved dc magnetron sputtering from a graphite target in nitrogen and hydrogen gas discharging. The films are investigated by using the Raman spectroscopy, x-ray photoelectron spectroscopy, spectral ellipsometer and electron spin resonance techniques. The optimized process condition for solar cells application is discussed. The photovoltaic property of a-CNx :H/silicon heterojunction can be improved by adjustment of pressure ratio of hydrogen to nitrogen and unbalanced magnetic field intensity. Open circuit voltage and short circuit current reach 300 mV and 5.52 mA/cm2 , respectively.
Key words ：
61.43.Dq
81.15.Cd
84.60.Jt
出版日期: 2001-04-01
:
61.43.Dq
(Amorphous semiconductors, metals, and alloys)
81.15.Cd
(Deposition by sputtering)
84.60.Jt
(Photoelectric conversion)
引用本文:
ZHOU Zhi-Bin;DING Zheng-Ming;PANG Qian-Jun;CUI Rong-Qiang. Amorphous Hydrogenated Carbon-Nitrogen Alloy Thin
Films for Solar Cell Application[J]. 中国物理快报, 2001, 18(4): 564-566.
链接本文:
https://cpl.iphy.ac.cn/CN/
或
https://cpl.iphy.ac.cn/CN/Y2001/V18/I4/564
[1]
LIU Xi-Zhe;HUANG Zhen;LI Ke-Xin;LI Hong;LI Dong-Mei;CHEN Li-Quan;MENG Qing-Bo. Recombination Reduction in Dye-Sensitized Solar Cells by Screen-Printed TiO2 Underlayers
[2]
LAI Yun-Feng;FENG Jie;QIAO Bao-Wei;HUANG Xiao-Gang;CAI Yan-Fei;LIN Yin-Yin;TANG Ting-Ao;CAI Bing-Chu;CHEN Bomy. Multiple-State Storage Capability of Stacked Chalcogenide Films (Si16 Sb33 Te51 /Si4 Sb45 Te51 /Si39 Sb Te50 ) for Phase Change Memory
[3]
WU Wen-Juan;ZHU Jing-Tao;WANG Zhan-Shan;ZHANG Zhong;WANG Feng-Li;WANG Hong-Chang;ZHANG Shu-Min;XU Yao;CHENG Xin-Bin;WANG Bei;LI Cun-Xia;WU Yong-Rong;QIN Shu-Ji;CHEN Ling-Yan;ZHOU Hong-Jun;HUO Tong-Lin. High Spectral Resolution Mo/Si Multilayers Working at High Order Reflection
[4]
XU Wei-Wei;DAI Song-Yuan; HU Lin-Hua;LIANG Lin-Yun;WANG Kong-Jia. Influence of Yb-Doped Nanoporous TiO2 Films on Photovoltaic Performance of Dye-Sensitized Solar Cells
[5]
XU Chuan-Ming;SUN Yun;ZHOU Lin;LI Feng-Yan; ZHANG Li;XUE Yu-Ming;ZHOU Zhi-Qiang;HE Qing. Preparation of Cu(In,Ga)Se2 Thin Film Solar Cells by Selenization of Metallic Precursors in an Ar Atmosphere
[6]
YANG Deng-Ke;WEN Cui-E;HAN Fu-Sheng;WANG Qing-Zhou;LI Hai-Jin. Preparation of Mg55 Ni35 Si10 Amorphous Powders by Mechanical Alloying and Consolidation by Vacuum Hot Pressing
[7]
WEI He-Lin;ZHANG Xi-Xiang;HUANG Han-Chen. Spontaneous Hillock Growth on Indium Film Surface
[8]
LIU Yuan;ZHANG Tai-Hua;WEI Bing-Chen;XING Dong-Mei;LI Wei-Huo;ZHANG Ling-Chen. Effect of Structural Relaxation on Deformation Behaviour of Zr-Based
[9]
WEI He-Lin;HUANG Han-Chen;ZHANG Xi-Xiang. Growth of Indium Nanorods by Magnetron Sputtering
[10]
ZHOU Bing-Qing;LIU Feng-Zhen;ZHANG Qun-Fang;XU Ying;ZHOU Yu-Qin;LIU Jin-Long;ZHU Mei-Fang. Fabrication of c-Si:H(p)/c-Si(n) Heterojunction Solar Cells with Microcrystalline Emitters
[11]
JO Chol-Lyong;XIA Lei;DING Ding;DONG Yuan-Da. Glass Formation Ability and Kinetics of the Gd55 Al20 Ni25 Bulk Metallic Glass
[12]
XUE Cheng-Shan;WU Yu-Xin;ZHUANG Hui-Zhao;TIAN De-Heng;LIU Yi-An;HE Jian-Ting;AI Yu-Jie;SUN Li-Li;WANG Fu-Xue;CAO Yu-Ping. Fabrication of Syringe-Shaped GaN Nanorods
[13]
YUE Shuang-Lin;LUO Qiang;SHI Cheng-Ying;YANG Hong-Xin;WANG Qiang;XU Peng;GU Chang-Zhi. NiSi Film Synthesized by Isochronal Annealing in a Magnetron Sputtering System
[14]
MEN Hua;PANG Shu-Jie;LI Ran;ZHANG Tao. Crystallization Kinetics of Co48 Cr15 Mo14 C15 B6 Er2 Bulk Metallic Glass with High Thermal Stability
[15]
PANG Hong-Chao⊃LUO Shun-Zhong⊃LONG Xing-Gui⊃AN Zhu⊃LIU Ning⊃DUAN Yan-Min⊃WU Xing-Chun⊃YANG Ben-Fu⊃WANG Pei-Lu⊃ZHENG Si-Xiao. Effects of Substrate Temperature on Helium Content and Microstructure of Nanocrystalline Titanium Films
2001, Vol. 18 
