Effects of Substrate Temperature on Helium Content and Microstructure of Nanocrystalline Titanium Films
PANG Hong-Chao¹, LUO Shun-Zhong², LONG Xing-Gui², AN Zhu¹, LIU Ning¹, DUAN Yan-Min¹, WU Xing-Chun², YANG Ben-Fu², WANG Pei-Lu¹, ZHENG Si-Xiao1
¹Key laboratory of Radiation Physics and Technology of MOE, Institute of Nuclear Science and Technology, Sichuan University, Chengdu 610064
²Institute of Nuclear Physics and Chemistry, China Academy of Engineering Physics, Mianyang 321900
Effects of Substrate Temperature on Helium Content and Microstructure of Nanocrystalline Titanium Films
¹Key laboratory of Radiation Physics and Technology of MOE, Institute of Nuclear Science and Technology, Sichuan University, Chengdu 610064
²Institute of Nuclear Physics and Chemistry, China Academy of Engineering Physics, Mianyang 321900
Abstract： Helium-charged nanocrystalline titanium films have been deposited by He--Ar magnetron co-sputtering. The effects of substrate temperature on the helium content and microstructure of the nanocrystalline titanium films have been studied. The results indicate that helium atoms with a high concentration are evenly incorporated in the deposited titanium films. When the substrate temperature increases from 60°C to 350°C while the other deposition parameters are fixed, the helium content decreases gradually from 38.6 at.% to 9.2 at.%, which proves that nanocrystalline Ti films have a great helium storage capacity. The 2θ angle of the Bragg peak of (002) crystal planes of the He-charged Ti film shifts to a lower angle and that of (100) crystal plane is unchanged as compared with that of the pure Ti film, which indicates that the lattice parameter c increases and a keeps at the primitive value. The grain refining and helium damage result in the diffraction peak broadening.
PANG Hong-Chao⊃LUO Shun-Zhong⊃LONG Xing-Gui⊃AN Zhu⊃LIU Ning⊃DUAN Yan-Min⊃WU Xing-Chun⊃YANG Ben-Fu⊃WANG Pei-Lu⊃ZHENG Si-Xiao. Effects of Substrate Temperature on Helium Content and Microstructure of Nanocrystalline Titanium Films[J]. 中国物理快报, 2006, 23(12): 3238-3241.
PANG Hong-Chao&sup, LUO Shun-Zhong&sup, LONG Xing-Gui&sup, AN Zhu&sup, LIU Ning&sup, DUAN Yan-Min&sup, WU Xing-Chun&sup, YANG Ben-Fu&sup, WANG Pei-Lu&sup, ZHENG Si-Xiao. Effects of Substrate Temperature on Helium Content and Microstructure of Nanocrystalline Titanium Films. Chin. Phys. Lett., 2006, 23(12): 3238-3241.
2006, Vol. 23 
