Graded Index 532HR/1064HT Filter by Glancing Angle Deposition
SHEN Zi-Cai 1,2, LIU Shi-Jie 1,2, HUANG Jian-Bing 1, SHAO Jian-Da 1, FAN Zheng-Xiu 1
1Shanghai Institute of Optics and Fine Mechanics, Chinese Academy of Sciences, Shanghai 2018002Graduate School of the Chinese Academy of Sciences, Beijing 100049
Graded Index 532HR/1064HT Filter by Glancing Angle Deposition
1Shanghai Institute of Optics and Fine Mechanics, Chinese Academy of Sciences, Shanghai 2018002Graduate School of the Chinese Academy of Sciences, Beijing 100049
摘要Glancing angle deposition is a novel method to prepare graded index coatings. By using this method and physical vapour deposition, ZrO 2 is used to engineer graded index filter on BK7 glass substrate. Controlling the deposition rate and the periodic oscillation of oblique angle of deposited material, a 10-period graded index ZrO2 filter with high reflection near 532nm and high transmittance at wavelength 1064nm is fabricated. The causes of difference between the theoretical and experimental results are discussed in detail. The material properties and electron gun nonlinearity are possibly the main origins of the difference, which result in the variations in both thickness control and deposition rate of the film material.
Abstract：Glancing angle deposition is a novel method to prepare graded index coatings. By using this method and physical vapour deposition, ZrO 2 is used to engineer graded index filter on BK7 glass substrate. Controlling the deposition rate and the periodic oscillation of oblique angle of deposited material, a 10-period graded index ZrO2 filter with high reflection near 532nm and high transmittance at wavelength 1064nm is fabricated. The causes of difference between the theoretical and experimental results are discussed in detail. The material properties and electron gun nonlinearity are possibly the main origins of the difference, which result in the variations in both thickness control and deposition rate of the film material.
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2007, Vol. 24 
