摘要Semi-insulating (SI) GaN is grown using N2 as the nucleation layer (NL) carrier gas combined with an optimized annealing time by metalorganic chemical vapour deposition. Influence of using H2 and N2 as the NL carrier gas is investigated in our experiment. It is found that the sheet resistance of unintentionally doped GaN can be increased from 104Ω/sq to 1010Ω/sq by changing the NL carrier gas from H2 to N2 while keeping the other growth parameters to be constant, however crystal quality and roughness of the film are degraded unambiguously. This situation can be improved by optimizing the NL annealing time. The high resistance of GaN grown on NL using N2 as the carrier gas is due to higher density of threading dislocations caused by the higher density of nucleation islands and small statistic diameter grain compared to the one using H2 as carrier gas. Annealing the NL for an optimized annealing time can decrease the density of threading dislocation and improve the film roughness and interface of AlGaN/GaN without degrading the sheet resistance of as-grown GaN significantly. High-quality SI GaN is grown after optimizing the annealing time, and AlGaN/GaN high electron mobility transistors are also prepared.
Abstract：Semi-insulating (SI) GaN is grown using N2 as the nucleation layer (NL) carrier gas combined with an optimized annealing time by metalorganic chemical vapour deposition. Influence of using H2 and N2 as the NL carrier gas is investigated in our experiment. It is found that the sheet resistance of unintentionally doped GaN can be increased from 104Ω/sq to 1010Ω/sq by changing the NL carrier gas from H2 to N2 while keeping the other growth parameters to be constant, however crystal quality and roughness of the film are degraded unambiguously. This situation can be improved by optimizing the NL annealing time. The high resistance of GaN grown on NL using N2 as the carrier gas is due to higher density of threading dislocations caused by the higher density of nucleation islands and small statistic diameter grain compared to the one using H2 as carrier gas. Annealing the NL for an optimized annealing time can decrease the density of threading dislocation and improve the film roughness and interface of AlGaN/GaN without degrading the sheet resistance of as-grown GaN significantly. High-quality SI GaN is grown after optimizing the annealing time, and AlGaN/GaN high electron mobility transistors are also prepared.
(Methods of crystal growth; physics and chemistry of crystal growth, crystal morphology, and orientation)
引用本文:
ZHOU Zhong-Tang;XING Zhi-Gang;GUO Li-Wei;CHEN Hong;ZHOU Jun-Ming. Growth of Semi-Insulating GaN Using N2 as Nucleation Layer Carrier Gas Combining with an Optimized Annealing Time[J]. 中国物理快报, 2007, 24(6): 1645-1648.
ZHOU Zhong-Tang, XING Zhi-Gang, GUO Li-Wei, CHEN Hong, ZHOU Jun-Ming. Growth of Semi-Insulating GaN Using N2 as Nucleation Layer Carrier Gas Combining with an Optimized Annealing Time. Chin. Phys. Lett., 2007, 24(6): 1645-1648.
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