中国物理快报  2010, Vol. 27 Issue (6): 68103-068103    DOI: 10.1088/0256-307X/27/6/068103
  CROSS-DISCIPLINARY PHYSICS AND RELATED AREAS OF SCIENCE AND TECHNOLOGY 本期目录 | 过刊浏览 | 高级检索 |
Methods for Thickness Determination of SiC Homoepilayers by Using Infrared Reflectance Spectroscopy

LI Zhi-Yun, SUN Ji-Wei, ZHANG Yu-Ming, ZHANG Yi-Men, TANG Xiao-Yan

Key Laboratory of Wide Band-Gap Semiconductor Materials and Devices, School of Microelectronics, Xidian University, Xi'an 710071
Methods for Thickness Determination of SiC Homoepilayers by Using Infrared Reflectance Spectroscopy

LI Zhi-Yun, SUN Ji-Wei, ZHANG Yu-Ming, ZHANG Yi-Men, TANG Xiao-Yan

Key Laboratory of Wide Band-Gap Semiconductor Materials and Devices, School of Microelectronics, Xidian University, Xi'an 710071