2010, Vol. 27(6): 68103-068103    DOI: 10.1088/0256-307X/27/6/068103
Methods for Thickness Determination of SiC Homoepilayers by Using Infrared Reflectance Spectroscopy

LI Zhi-Yun, SUN Ji-Wei, ZHANG Yu-Ming, ZHANG Yi-Men, TANG Xiao-Yan

Key Laboratory of Wide Band-Gap Semiconductor Materials and Devices, School of Microelectronics, Xidian University, Xi'an 710071
收稿日期 2009-10-29  修回日期 1900-01-01
Supporting info

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