中国物理快报  2004, Vol. 21 Issue (2): 403-405    
  Original Articles 本期目录 | 过刊浏览 | 高级检索 |
An Experimental Analysis of Residual Stress Measurements in Porous Silicon Using Micro-Raman Spectroscopy
LEI Zhen-Kun1, KANG Yi-Lan1, HU Ming2, QIU Yu1, XU Han1, NIU Hong-Pan1
1Department of Mechanics, School of Mechanical Engineering, Tianjin University, Tianjin 300072 2Department of Electronic Science and Technology, School of Electronic Information Engineering, Tianjin University, Tianjin 300072
An Experimental Analysis of Residual Stress Measurements in Porous Silicon Using Micro-Raman Spectroscopy
LEI Zhen-Kun1;KANG Yi-Lan1;HU Ming2;QIU Yu1;XU Han1;NIU Hong-Pan1
1Department of Mechanics, School of Mechanical Engineering, Tianjin University, Tianjin 300072 2Department of Electronic Science and Technology, School of Electronic Information Engineering, Tianjin University, Tianjin 300072