中国物理快报  2005, Vol. 22 Issue (4): 984-986    
  Original Articles 本期目录 | 过刊浏览 | 高级检索 |
Residual Stress on Surface and Cross-section of Porous Silicon Studied by Micro-Raman Spectroscopy
LEI Zhen-Kun1,2, KANG Yi-Lan2, CEN Hao2, HU Ming3, QIU Yu2
1Department of Engineering Mechanics, Dalian University of Technology, Dalian 116024 2Department of Mechanics, School of Mechanical Engineering, Tianjin University, Tianjin 300072 3Department of Electronic Science and Technology, School of Electronic Information Engineering, Tianjin University, Tianjin 300072
Residual Stress on Surface and Cross-section of Porous Silicon Studied by Micro-Raman Spectroscopy
LEI Zhen-Kun1,2;KANG Yi-Lan2;CEN Hao2;HU Ming3;QIU Yu2
1Department of Engineering Mechanics, Dalian University of Technology, Dalian 116024 2Department of Mechanics, School of Mechanical Engineering, Tianjin University, Tianjin 300072 3Department of Electronic Science and Technology, School of Electronic Information Engineering, Tianjin University, Tianjin 300072