Effect of CO2 Addition on Preparation of Diamond Films by Direct-Current Hot-Cathode Plasma Chemical Vapor Deposition Method
ZHANG Chun-Mei1, ZHENG Yan-Bin2, JIANG Zhi-Gang2, LV Xian-Yi2, HOU Xue2, HU Shuang2, LIU Jun-Wei2
1Department of Foundation, Jilin Business and Technology College, Changchun 130062 2State Key Laboratory of Superhard Materials, Jilin University, Changchun 130012
Effect of CO2 Addition on Preparation of Diamond Films by Direct-Current Hot-Cathode Plasma Chemical Vapor Deposition Method
ZHANG Chun-Mei1, ZHENG Yan-Bin2, JIANG Zhi-Gang2, LV Xian-Yi2, HOU Xue2, HU Shuang2, LIU Jun-Wei2
1Department of Foundation, Jilin Business and Technology College, Changchun 130062 2State Key Laboratory of Superhard Materials, Jilin University, Changchun 130012
Diamond films are deposited on Mo substrates by dc hot-cathode plasma chemical vapor deposition method using a CH4-H2-CO2 gas mixture. Adjusting the flow of CO2, we study the relevant influence on surface morphology, grain orientation and crystalline quality of films with scanning electron microscopy, x-ray diffraction, Raman spectroscopy, respectively. The results show that grain orientation of the films has a transition with the increasing CO2 addition, from (100) orientation to (110) orientation and then (111) orientation. The crystalline quality is improved but the growth rate is decreased by raising the flow of CO2. The experimental results are also discussed briefly.
Diamond films are deposited on Mo substrates by dc hot-cathode plasma chemical vapor deposition method using a CH4-H2-CO2 gas mixture. Adjusting the flow of CO2, we study the relevant influence on surface morphology, grain orientation and crystalline quality of films with scanning electron microscopy, x-ray diffraction, Raman spectroscopy, respectively. The results show that grain orientation of the films has a transition with the increasing CO2 addition, from (100) orientation to (110) orientation and then (111) orientation. The crystalline quality is improved but the growth rate is decreased by raising the flow of CO2. The experimental results are also discussed briefly.
ZHANG Chun-Mei;ZHENG Yan-Bin;JIANG Zhi-Gang;LV Xian-Yi;HOU Xue;HU Shuang;LIU Jun-Wei. Effect of CO2 Addition on Preparation of Diamond Films by Direct-Current Hot-Cathode Plasma Chemical Vapor Deposition Method[J]. 中国物理快报, 2010, 27(8): 88103-088103.
ZHANG Chun-Mei, ZHENG Yan-Bin, JIANG Zhi-Gang, LV Xian-Yi, HOU Xue, HU Shuang, LIU Jun-Wei. Effect of CO2 Addition on Preparation of Diamond Films by Direct-Current Hot-Cathode Plasma Chemical Vapor Deposition Method. Chin. Phys. Lett., 2010, 27(8): 88103-088103.
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2010, Vol. 27 
