| CONDENSED MATTER: STRUCTURE, MECHANICAL AND THERMAL PROPERTIES |
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Characteristics of Sb$_{6}$Te$_{4}$/VO$_{2}$ Multilayer Thin Films for Good Stability and Ultrafast Speed Applied in Phase Change Memory |
| Yi-Feng Hu1,3,4**, Xuan Guo1, Qing-Qian Qiu2, Tian-Shu Lai2 |
1School of Mathematics and Physics, Jiangsu University of Technology, Changzhou 213000
2State Key Laboratory of Optoelectronic Materials and Technology, School of Physics, Sun Yat-Sen University, Guangzhou 510275
3State Key Laboratory of Silicon Materials, Zhejiang University, Hangzhou 310027
4Key Laboratory of Microelectronic Devices & Integrated Technology, Institute of Microelectronics, Chinese Academy of Sciences, Beijing 100029
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| Cite this article: |
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Yi-Feng Hu, Xuan Guo, Qing-Qian Qiu et al 2018 Chin. Phys. Lett. 35 096801 |
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Abstract The Sb$_{6}$Te$_{4}$/VO$_{2}$ multilayer thin films are prepared by magnetron sputtering and the potential application in phase change memory is investigated in detail. Compared with Sb$_{6}$Te$_{4}$, Sb$_{6}$Te$_{4}$/VO$_{2}$ multilayer composite thin films have higher phase change temperature and crystallization resistance, indicating better thermal stability and less power consumption. Also, Sb$_{6}$Te$_{4}$/VO$_{2}$ has a broader energy band of 1.58 eV and better data retention (125$^{\circ}\!$C for 10 y). The crystallization is suppressed by the multilayer interfaces in Sb$_{6}$Te$_{4}$/VO$_{2}$ thin film with a smaller rms surface roughness for Sb$_{6}$Te$_{4}$/VO$_{2}$ than monolayer Sb$_{4}$Te$_{6}$. The picosecond laser technology is applied to study the phase change speed. A short crystallization time of 5.21 ns is realized for the Sb$_{6}$Te$_{4}$(2 nm)/VO$_{2}$ (8 nm) thin film. The Sb$_{6}$Te$_{4}$/VO$_{2}$ multilayer thin film is a potential and competitive phase change material for its good thermal stability and fast phase change speed.
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Received: 27 April 2018
Published: 29 August 2018
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| PACS: |
68.05.Cf
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(Liquid-liquid interface structure: measurements and simulations)
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68.55.-a
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(Thin film structure and morphology)
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68.65.-k
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(Low-dimensional, mesoscopic, nanoscale and other related systems: structure and nonelectronic properties)
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| Fund: Supported by the National Natural Science Foundation of China under Grant No 11774438, the Natural Science Foundation of Jiangsu Province under Grant No BK20151172, the Qing Lan Project, the Opening Project of State Key Laboratory of Silicon Materials under Grant No SKL2017-04, the Opening Project of Key Laboratory of Microelectronic Devices and Integrated Technology of Chinese Academy of Sciences, and the Postgraduate Research and Practice Innovation Program of Jiangsu Province under Grant No SJCX18_1024. |
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| [1] | Hu Y F, Zhu X Q, Zou H, Zheng L, Song S N and Song Z T 2017 J. Alloys Compd. 696 150 | | [2] | Yang C, Liu L B, Yin S Y and Wei S J 2014 Sci. Chin. Ser. G 57 2214 | | [3] | Ren K, Li R H, Chen X, Wang Y, Shen J B, Xia M J, Lv S L, Ji Z G and Song Z T 2018 Appl. Phys. Lett. 112 073106 | | [4] | Qian H, Tong H, He M Z, Ji H K, Zhou L J, Xu M and Miao X S 2018 Sci. Rep. 8 486 | | [5] | Hatayama S, Sutou Y, Shindo S, Saito Y, Song Y H, Ando D and Koike J 2018 ACS Appl. Mater. Interfaces 10 2725 | | [6] | Zou H, Zhu X Q, Hu Y F, Sui Y X, Zhang J H and Song Z T 2017 J. Mater. Sci.: Mater. Electron. 28 17719 | | [7] | Zhu W L, Wen T, Hu Y F, Liu X Y, Gu D, Lai T S and Zhai J W 2017 J. Alloys Compd. 723 936 | | [8] | Hu Y F, You H P, Zhu X Q, Zou H, Zhang J H, Song S N and Song Z T 2017 J. Non-Cryst. Solids 457 141 | | [9] | Wu W H, He Z F, Chen S, Zhai J W, Song S N and Song Z T 2017 J. Phys. D 50 095602 | | [10] | Wang G, Zhang Y W, Liu P, Wang J X, Nie Q H and Shen X 2018 Mater. Lett. 213 342 | | [11] | Meng Y, Wu L C, Song Z T, Wen S, Jing M H, Wei J S, Wang Y 2017 Mater. Lett. 201 109 | | [12] | He Z F, Wu W H, Liu X Y, Zhai J W, Lai T S, Song S N and Song Z T 2016 Mater. Lett. 185 399 | | [13] | Zhu C Q, Ma J, Ge X M, Rao F, Ding K Y, Lv S L, Wu L C and Song Z T 2016 Appl. Phys. Lett. 108 252102 | | [14] | Zhu Y Q, Zhang Z H, Song S N, Xie H Q, Song Z T, Li X Y, Shen L L, Li L, Wu L C and Liu B 2015 Mater. Res. Bull. 64 333 | | [15] | Rao F, Song Z T, Ren K, Zhou X L, Cheng Y, Wu L C and Liu B 2011 Nanotechnology 22 10 | | [16] | Rao F, Ding K Y, Zhou Y X, Zheng Y H, Xia M J, Lv S L, Song Z T, Feng S L, Ronneberger I, Mazzarello R, Zhang W and Ma E 2017 Science 358 1423 | | [17] | Ren K, Xia M J, Rao F, Song Z T, Ding K Y, Ji X L, Wu L C, Liu B and Feng S L 2014 Appl. Phys. Lett. 104 173102 | | [18] | Ding K Y, Ren K, Rao F, Song Z T, Wu L C, Liu B and Feng S L 2014 Mater. Lett. 125 143 | | [19] | You H P , Hu Y F , Zhu X Q , Zou H , Song S N and Song Z T 2018 Appl. Phys. A 124 168 | | [20] | Hu Y F, He Z F, Zhai J W, Wu P Z, Lai T S, Song S N and Song Z T 2015 Appl. Phys. A 121 1125 | | [21] | He Z F, Wu P Z, Liu R R, Zhai J W, Lai T S, Song S N and Song Z T 2016 CrystEngComm 18 1230 | | [22] | Kumar S, Singh D, Shandhu S and Thangaraj R 2012 Appl. Surf. Sci. 258 7406 | | [23] | You H P, Hu Y F, Zhu X Q and Zou H 2017 J. Mater. Sci.: Mater. Electron. 28 5562 | | [24] | Xue Y, Song S N , Yan S, Guo T Q, Shen L L, Wu L C, Song Z T and Feng S L 2017 J. Alloys Compd. 727 1288 | | [25] | Hu Y F, Zhu X Q, Zou H, Lu Y, Xue J Z, Sui Y X, Wu W H, Yuan L, Song S N and Song Z T 2015 J. Mater. Sci.: Mater. Electron. 26 7757 |
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