PHYSICS OF GASES, PLASMAS, AND ELECTRIC DISCHARGES |
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Dynamics of Ring-to-Volume Discharge Transition in $H$ Mode in Inductively Coupled Plasma Torches at Atmospheric Pressure |
Qi-Jia Guo1,2, Guo-Hua Ni1,3**, Lin Li1, Qi-Fu Lin1, Yan-Jun Zhao1, Si-Yuan Sui1, Hong-Bing Xie1, Wen-Xue Duan1, Yue-Dong Meng1 |
1Institute of Plasma Physics, Chinese Academy of Sciences, Hefei 230031 2University of Science and Technology of China, Hefei 230026 3AnHui Province Key Laboratory of Medical Physics and Technology, Hefei 230031
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Cite this article: |
Qi-Jia Guo, Guo-Hua Ni, Lin Li et al 2018 Chin. Phys. Lett. 35 075202 |
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Abstract The transition process in ring-to-volume discharge in $H$ mode in inductively coupled plasma torches at atmospheric pressure is investigated by analyzing the time resolved image taken by a high speed camera. The effects of input power, plasma working gas flow rate, and its composition on the transition dynamics are also discussed. The results show that the discharge plasma has experienced ring discharge, and the development stage diffused from the boundary to the center in the confinement tube, and steady volume discharge after entering the $H$ mode. Increasing input power, sheath gas flow rate and hydrogen contents in plasma working gas are all able to lessen the time consumed in the transition process in ring-to-volume discharge.
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Received: 12 March 2018
Published: 24 June 2018
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PACS: |
52.50.Qt
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(Plasma heating by radio-frequency fields; ICR, ICP, helicons)
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52.30.Cv
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(Magnetohydrodynamics (including electron magnetohydrodynamics))
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Fund: Supported by the National Natural Science Foundation of China under Grant Nos 21377133, 11535003 and 11505223, the Provincial Science and Technology Major Project of Anhui Province under Grant No 17030801035, and the Science and Technology Service Network Initiative of Chinese Academy of Sciences. |
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