CONDENSED MATTER: ELECTRONIC STRUCTURE, ELECTRICAL, MAGNETIC, AND OPTICAL PROPERTIES |
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The Theoretical Investigation and Analysis of High-Performance ZnO Double-Gate Double-Layer Insulator Thin-Film Transistors |
GAO Hai-Xia**, HU Rong, YANG Yin-Tang |
School of Microelectronics, Xidian University, Xi'an 710071
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Cite this article: |
GAO Hai-Xia, HU Rong, YANG Yin-Tang 2012 Chin. Phys. Lett. 29 017305 |
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Abstract A novel structure of a ZnO thin-film transistor with a double-gate and double-layer insulator is proposed to improve device performance. Compared with the conventional ZnO thin-film transistor structure, the novel thin-film transistor has a higher on-state current, steeper sub-threshold characteristics and a lower threshold voltage, owing to the double-gate and high-k dielectric. Based on two-dimensional simulation, the potential channel distribution and the reasons for the improvement in performance are investigated.
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Keywords:
73.50.Bk
77.55.Hf
77.55.D-
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Received: 19 September 2011
Published: 07 February 2012
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[1] Hirao T, Furuta M, Hiramatsu T, Matsuda T, Li C, Furuta H, Hokari H, Yoshida M, Ishii H and Kakegawa M 2008 IEEE Trans. Electron. Devices 55 3136
[2] Zhao W, Dong X, Zhao L, Shi Z F, Wang J, Wang H, Xia X C, Chang Y C, Zhang B L and Du G T 2010 Chin. Phys. Lett. 27 128504
[3] Lee K, Ko G, Lee G H, bok Han G, Sung M M, Ha T W, Kim J H and Im S 2010 Appl. Phys. Lett. 97 082110
[4] Zhou Y M, He Y G, Lu A X and Wan Q 2009 Chin. Phys. B 18 3966
[5] Zhang A, Zhao X R, Duan L B, Liu J M and Zhao J L 2011 Chin. Phys. B 20 057201
[6] Oh B Y, Kim Y H, Lee H J, Kim B Y, Park H G, Han J W, Heo G S, Kim T W, Kim K Y and Seo D S 2011 Semicond. Sci. Technol. 26 085007
[7] Yi M D, Xie L H, Liu Y Y, Dai Y F and Huang J Y 2011 Chin. Phys. Lett. 28 017302
[8] Lim H, Yin H, Park J S, Song I, Kim C, Park J C, Kim S I, Kim S W, Lee C B and Kim Y C 2008 Appl. Phys. Lett. 93 063505
[9] Tsai C C, Lee Y J, Wang J L, Wei K F and Lee I 2008 Solid State Electron. 52 365
[10] Li C S, Li Y N, Wu Y L, Ong B S and Loutfy R O 2008 J. Phys. D 41 125102
[11] Chang S, Song Y W, Lee S, Lee S Y and Ju B K 2008 Appl. Phys. Lett. 92 192104
[12] Zhang L, Li J, Zhang X, Jiang X and Zhang Z 2010 Thin Solid Films 518 6130
[13] Gao H X, Hu R and Yang Y T 2011 Chin. Phys. B 20 116803
[14] Walker P M, Mizuta H, Uno S, Furuta Y and Hasko D G 2004 IEEE Trans. Electron. Devices 51 212
[15] Hossain F M, Nishii J, Takagi S, Ohtomo A, Fukumura T, Fujioka H, Ohno H, Koinuma H and Kawasaki M 2003 J. Appl. Phys. 94 7768
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