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Highly Sensitive Rayleigh Wave Hydrogen Sensors with WO3 Sensing Layers at Room Temperature |
| WANG Cheng, FAN Li, ZHANG Shu-Yi**, YANG Yue-Tao, ZHOU Ding-Mao, SHUI Xiu-Ji
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Lab of Modern Acoustics, Institute of Acoustics, Nanjing University, Nanjing 210093
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| Cite this article: |
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WANG Cheng, FAN Li, ZHANG Shu-Yi et al 2011 Chin. Phys. Lett. 28 110701 |
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Abstract Rayleigh wave hydrogen sensors based on 128° YX−LiNbO3 substrates with WO3 sensing layers operating at room temperature are studied. The experimental results indicate that the WO3 layers obtained by a sol−gel method have much higher sensitivities because the sensing layers produced by the sol-gel method have small grains and high roughness and porosity. It is also confirmed that in the sol-gel method, keeping WO3 solutions at low temperature and/or decreasing the viscosity of the solutions can decrease the grain sizes and increase the hydrogen-absorbability of the sensing layer. Under the optimized preparation conditions, the high sensitivity of the hydrogen sensors at room temperature is obtained, in which 1% hydrogen in natural air induces the frequency shift of 72 kHz at the operating frequency of 124.2 MHz.
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| Keywords:
07.07.Df
81.20.Fw
43.35.Yb
43.38.Rh
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Received: 14 July 2011
Published: 30 October 2011
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| PACS: |
07.07.Df
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(Sensors (chemical, optical, electrical, movement, gas, etc.); remote sensing)
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81.20.Fw
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(Sol-gel processing, precipitation)
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43.35.Yb
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(Ultrasonic instrumentation and measurement techniques)
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43.38.Rh
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(Surface acoustic wave transducers)
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