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Growth and Characterization of a Kind of Nitrogen-Rich Niobium Nitride for Bolometer Applications at Terahertz Frequencies |
| LU Xue-Hui1, KANG Lin1, ZHOU Lei1, CHEN Jian1, JI Zheng-Ming1, CAO Chun-Hai1, JIN Biao-Bing1, XU Wei-Wei1, WU Pei-Heng1, WANG Xiao-Shu2 |
| 1Research Institute of Superconductor Electronics (RISE), Department of Electronic Science and Engineering, Nanjing University, Nanjing 2100932Center for Materials Analysis, Nanjing University, Nanjing 210093 |
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| Cite this article: |
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LU Xue-Hui, KANG Lin, ZHOU Lei et al 2008 Chin. Phys. Lett. 25 4076-4078 |
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Abstract Niobium is sputtered onto a single crystalline silicon substrate in N2:Ar=4:1 gas mixture at the total pressure of 2Pa. The temperature coefficient of resistance of the sample is about 0.5% at 300K, and up to 7% at 77K, indicating the possibility of using it to make room-temperature bolometers with performances better than those based on Pt, Bi, or Nb. For a 60-nm-thick sample, the rms surface roughness is 0.45nm over an area of 2μm×2μm. Analyses based on x-ray diffraction and x-ray photoelectronic spectroscopy indicate that the samples are Nb5N6 thin films in which there is a combination of Nb3+ and Nb5+, or Nb4+.
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| Keywords:
61.05.-a
65.80.-n
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Received: 13 June 2008
Published: 25 October 2008
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[1] Richards P L 1994 J. Appl. Phys. 76 12
[2] Myers M J et al 2005 IEEE Trans. Appl. Supercond.
2 564
[3] Baselmans J J A et al 2005 IEEE Trans. Appl.
Supercond. 2 484
[4]Nahum M and Martinis J M 1993 Appl. Phys. Lett.
63 22
[5] Bourgeois O et al 2006 Rev. Sci. Instrum. 77
126108-1
[6] Querlioz D et al 2005 Appl. Phys. Lett. 87
221901
[7] 1997 Periodic Table SE v3.5 (SMI Corporation, Tulsa,
USA)
[8]Tyutyunnik A et al 1998 J. Alloys Compd. 278 83
[9] Terao N 1971 J. Less-Common Met. 23 159
[10] Jouve G et al 1996 Thin Solid Films 287 146
[11] Kang L et al 2003 Supercond. Sci. Technol.
16 1417
[12] Darlinski A et al 1987 Surf. Interface Anal.
10 223
[13] NIST 2007 X-ray Photoelectron Spectroscopy Database
v3.5 (USA)
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