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Sputtering Induced by Arq+ Impact on Nb Surface |
| WANG Tie-Shan1, CHEN Liang1, PENG Hai-Bo1, CHENG Rui1, XIANG Yang1, WANG Yu-Yu2, XIAO Guo-Qing2 |
| 1School of Nuclear Science and Technology, Lanzhou University, Lanzhou 7300002Institute of Modern Physics, Chinese Academy of Science, Lanzhou 730000 |
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| Cite this article: |
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WANG Tie-Shan, CHEN Liang, PENG Hai-Bo et al 2008 Chin. Phys. Lett. 25 3643-3645 |
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Abstract The relative sputtering yield induced by highly charged Arq+ impacting on Nb surface is investigated. The yield increases drastically as the incidence angle increases. A formula Y=A*tanB(θ)+C, developed from classical sputtering theory, fits well with the yield. By analysing a series of coefficients A and C extracted by curve fitting, the results demonstrate the presence of a synergy of the linear cascade collision and potential energy deposition.
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| Keywords:
34.50.Dy
34.50.Bw
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Received: 05 December 2007
Published: 26 September 2008
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[1] Arnau A et al 1997 Surf. Sci. Rep. 27 113
[2] Schenkel T, Hamza A V, Barnes A V, Schneider D H 1999 Prog. Surf. Sci. 61 23
[3] Gillaspy J D 2001 J. Phys. B: At. Mol. Opt.Phys. 34 R93
[4] Wang T S, Yang X Y, B. E. O'Rourke, Xu H, Chen L et al2008 Chin. Phys. Lett. 25 2020
[5] Borsoni G et al 2000 J. Vac. Sci. Technol. B 18 3535
[6] Gillaspy J D, Parks D C and Ratliff L P 1998 J. Vac.Sci. Technol. B 16 3294
[7] Schenkel T et al 2003 J. Appl. Phys. 94 7017
[8] Bitenskii I S, Murakhmetov M N, Parilis E S 1979 Sov.Phys. Tech. Phys. 24 618
[9] Stampfli P, Bennemann K H 1996 Appl. Phys. A 60191
[10] Neidhart T, Pitchler F, Aumayr F, et al. 1995 Phys.Rev. Lett. 74 5280
[11] Hayderer G, Cernusca S, Schmid M, Varga P, Winter HP andAumayr F 2001 Phys. Rev. Lett. 86 16
[12] Sekioka T, Terasawa M, Sataka M, Kitazawa S, Niibe M2002 Nucl. Instrum. Methods B 193 751
[13] Hayderer G, Cernusca S, Hoffmann V et al 2001 Nucl.Instrum. Methods B 182 143
[14] Wang Y Y, Zhao Y T, Fang Y, Xiao G Q and Wang T S 2006 J. At. Mol. Phys. 23 3 (in Chinese)
[15] Dunlop A and Lesueur D 1993 Radiat. Eff. Def.Solids 126 123 |
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