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Characteristics of Microwave Discharge in a Modified Surfaguide with a Large Diameter |
| DING Zhen-Feng1;P. Tristant2;J. Desmaison2;DONG Chuang1;WANG You-Nian1 |
| 1State Key Laboratory of Materials Modification by Laser, Ion and Electron Beams, Dalian University of Technology, Dalian 116023
2SPCTS, UMR CNRS 6638, Université de Limoges 123 av. Albert Thomas, Limoges F-87060, France |
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| Cite this article: |
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DING Zhen-Feng, P. Tristant, J. Desmaison et al 2003 Chin. Phys. Lett. 20 1792-1794 |
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Abstract The characteristics of the microwave discharge are studied in a modified surfaguide with a large diameter. Experimental results show that there exist three discharging modes, one is the plasma mode, and the others are the waveguide modes. The discharge can jump between one of the waveguide modes and the plasma mode, and the corresponding hysteresis loop is influenced by the discharging pressure. In the higher pressure region, the hysteresis loop is wide enough so that the discharge in each mode is stable. In the middle pressure region, the discharge becomes unstable as a result of the hysteresis loop being sufficiently narrow. When the gas pressure is further decreased, the plasma mode disappears, while the mode jumps between the two waveguide modes always appear and are stable in the discharge region we have explored.
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| Keywords:
52.50.Dg
52.40.Db
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Published: 01 October 2003
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| PACS: |
52.50.Dg
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(Plasma sources)
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52.40.Db
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(Electromagnetic (nonlaser) radiation interactions with plasma)
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