Chin. Phys. Lett.  2001, Vol. 18 Issue (2): 260-262    DOI:
Original Articles |
Macro-pyramid in GaN Film
ZHOU Jing;YANG Zhi-Jian;XU Shi-Fa;ZHU Xing;ZHANG Guo-Yi
Mesoscopic Physics National Laboratory and Department of Physics, Peking University, Beijing 100871
Cite this article:   
ZHOU Jing, YANG Zhi-Jian, XU Shi-Fa et al  2001 Chin. Phys. Lett. 18 260-262
Download: PDF(1156KB)  
Export: BibTeX | EndNote | Reference Manager | ProCite | RefWorks
Abstract A thin film of GaN with the thickness of 1.0μm was grown on α-Al2O3 substrate by metal organic chemical vapour disposition and then a thick GaN film with thickness of 12μm was grown in the halide vapour phase epitaxy system. Some macro-pyramids appeared on the surface of the sample. The macro-pyramids made the surface of the GaN film rough, which was harmful to the devices made by GaN materials. These defects changed the distribution of carrier concentration and affected the optical properties of GaN. The step height of the pyramids was about 30-40 nm measured by atomic force microscopy. A simple model was proposed to explain the macro-pyramid phenomenon compared with the growth spiral. The growth of the macro-pyramid was relative to the physical conditions in the reaction zone. Both increasing growth temperature and low pressure may reduce the pyramid size.
Keywords: 68.55.-a      68.35.Bs      61.72.Bb     
Published: 01 February 2001
PACS:  68.55.-a (Thin film structure and morphology)  
  68.35.Bs  
  61.72.Bb (Theories and models of crystal defects)  
TRENDMD:   
URL:  
https://cpl.iphy.ac.cn/       OR      https://cpl.iphy.ac.cn/Y2001/V18/I2/0260
Service
E-mail this article
E-mail Alert
RSS
Articles by authors
ZHOU Jing
YANG Zhi-Jian
XU Shi-Fa
ZHU Xing
ZHANG Guo-Yi
Related articles from Frontiers Journals
[1] DING Tao, SONG Jun-Qiang, CAI Qun. Effect of Multiple Depositions and Annealing Treatments on the Erbium Silicide Nanoislands Self-Assembled on Si(001) Substrates[J]. Chin. Phys. Lett., 2012, 29(3): 260-262
[2] CHENG Feng-Feng , FA Tao, WANG Xin-Qiang, YAO Shu-De. Dislocation and Elastic Strain in an InN Film Characterized by Synchrotron Radiation X-Ray Diffraction and Rutherford Backscattering/Channeling[J]. Chin. Phys. Lett., 2012, 29(2): 260-262
[3] XU Wei-Wei, HU Lin-Hua, LUO Xiang-Dong, LIU Pei-Sheng, DAI Song-Yuan**. The Electric Mechanism of Surface Pretreatments for Dye-Sensitized Solar Cells Based on Internal Equivalent Resistance Analysis[J]. Chin. Phys. Lett., 2012, 29(1): 260-262
[4] JIN Min**, FANG Yong-Zheng, SHEN Hui, JIANG Guo-Jian, WANG Zhan-Yong, XU Jia-Yue . Mechanical Property Evaluation of GaAs Crystal for Solar Cells[J]. Chin. Phys. Lett., 2011, 28(8): 260-262
[5] PAN Jiang-Hong, LIU Li-Zhe, LIU Min** . Hydrogenic-Donor Impurity States in GaAs/Al xGa 1−xAs Quantum Dots in the Presence of an Electric Field[J]. Chin. Phys. Lett., 2011, 28(8): 260-262
[6] CHEN San, **, Lu Hong-Yan, CHEN Kun-Ji**, XU Jun, MA Zhong-Yuan, LI Wei, HUANG Xin-Fan . Two-Dimensional Cavity Resonant Modes of Si Based Bragg Reflection Ridge Waveguide[J]. Chin. Phys. Lett., 2011, 28(6): 260-262
[7] CHENG Fang, LIU Ting-Yu**, ZHANG Qi-Ren, QIAO Hai-Ling, ZHOU Xiu-Wen . Computer Simulation of the Electronic Structures and Absorption Spectra for a KMgF3 Crystal Containing a Potassium Vacancy[J]. Chin. Phys. Lett., 2011, 28(3): 260-262
[8] WU Bin-Bin, PAN Feng-Ming**, YANG Yu-E . Annealing Effect of Pulsed Laser Deposited Transparent Conductive Ta-Doped Titanium Oxide Films[J]. Chin. Phys. Lett., 2011, 28(11): 260-262
[9] ZHENG Bi-Ju, LIAN Jian-She**, ZHAO Lei, JIANG Qing . Optical and Electrical Properties of ZnO/CdO Composite Thin Films Prepared by Pulse Laser Deposition[J]. Chin. Phys. Lett., 2011, 28(1): 260-262
[10] JI Guo-Jun, SHI Zhi-Ming. AFM and XPS Study of Glass Surface Coated with Titania Nanofilms by Sol-Gel Method[J]. Chin. Phys. Lett., 2010, 27(9): 260-262
[11] JI Shuai-Hua, FU Ying-Shuang, ZHANG Tong, CHEN Xi, JIA Jin-Feng, XUE Qi-Kun, MA Xu-Cun. Kondo Effect in Self-Assembled Manganese Phthalocyanine Monolayer on Pb Islands[J]. Chin. Phys. Lett., 2010, 27(8): 260-262
[12] YU Sen-Jiang, ZHANG Yong-Ju, CHEN Miao-Gen,. Edge Effects on Growth of Ordered Stress Relief Patterns in Free Sustained Aluminum Films[J]. Chin. Phys. Lett., 2010, 27(6): 260-262
[13] WANG Na, ZHANG Wen-Di, XU Ji-Peng, MA Bin, ZHANG Zong-Zhi, JIN Qing-Yuan, E. Bunte, J. Hüpkes, H. P. Bochem. Fabrication of Anodic Aluminum Oxide Templates with Small Interpore Distances[J]. Chin. Phys. Lett., 2010, 27(6): 260-262
[14] NA Yuan-Yuan, WANG Cong, LIU Yu. The Influence of Au-Doping on Morphology and Visible-Light Reflectivity of TiN Thin Films Deposited by Direct-Current Reactive Magnetron Sputtering[J]. Chin. Phys. Lett., 2010, 27(5): 260-262
[15] NI Hai-Tao, ZHANG Xi-Yan, ZHU Yu-Tao. Quantitative Characterization of Partial Dislocations in Nanocrystalline Metals[J]. Chin. Phys. Lett., 2010, 27(5): 260-262
Viewed
Full text


Abstract