Emission Spectroscopy for Hot Filament Diamond Growth Process with Positive Substrate Biasing

Chin. Phys. Lett.

1996, Vol. 13

Issue (3): 192-195 DOI:

Original Articles

Emission Spectroscopy for Hot Filament Diamond Growth Process with Positive Substrate Biasing

CUI Jing-biao;FANG Rong-chuan

Department of Physics, Structure Research Laboratory, University of Science and Technology of China, Hefei 230026

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CUI Jing-biao, FANG Rong-chuan 1996 Chin. Phys. Lett. 13 192-195

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Abstract Optical emission spectrum has been successfully measured on a hot filament diamond growth process with substrate biasing. The emission lines of atomic hydrogen, H₂, CH and CH⁺ were observed. Effects of methane concentration on the emission intensity of observed lines were systematically studied. The experimental results suggest that atomic hydrogen and CH⁺ radicals play an important role in diamond growth, while CH radical facilitates the formation of amorphous carbon.

Keywords: 52.70.-m

Published: 01 March 1996

PACS:

52.70.-m

(Plasma diagnostic techniques and instrumentation)

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https://cpl.iphy.ac.cn/ OR https://cpl.iphy.ac.cn/Y1996/V13/I3/0192

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