Two Crystal Phases of C<suB>3</suB>N<suB>4</suB> Found in Carbon Nitride Films Prepared by Ion Implantation

Chin. Phys. Lett.

1996, Vol. 13

Issue (10): 782-785 DOI:

Original Articles

Two Crystal Phases of C₃N₄ Found in Carbon Nitride Films Prepared by Ion Implantation

GU You-song;PAN Li-qing;ZHAO Min-xue;CHANG Xiang-rong, TIAN Zhong-zhuo;XIAO Ji-mei

Department of Material Physics, and State Key Laboratory of New Metal Materials, Beijing University of Sciences and Technology, Beijing 100083

Cite this article:

GU You-song, PAN Li-qing, ZHAO Min-xue et al 1996 Chin. Phys. Lett. 13 782-785

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Abstract CN_x films prepared by high dose ion implantation and post-annealing were studied by Auger electron spectroscopy, x-ray photoelectron spectroscopy and x-ray diffraction. A nearly uniform CN_x layer was formed. Carbon and nitrogen were found covalently bonded in the films. X-ray diffraction results showed that two crystal phases of C₃N₄, β-C₃N₄ and p-C₃N₄, have been formed in the matrix of carbon.

Keywords: 68.55.Jk 68.55.Ng 61.10.Lx

Published: 01 October 1996

PACS:	68.55.Jk
	68.55.Ng
	61.10.Lx

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https://cpl.iphy.ac.cn/ OR https://cpl.iphy.ac.cn/Y1996/V13/I10/0782

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	GU You-song
	PAN Li-qing
	ZHAO Min-xue
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	TIAN Zhong-zhuo
	XIAO Ji-mei

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