Synthesis of β-FeSi<suB>2</suB> Film by Reactive Deposition-Solid Phase Epitaxy

Chin. Phys. Lett.

1995, Vol. 12

Issue (5): 301-304 DOI:

Original Articles

Synthesis of β-FeSi₂ Film by Reactive Deposition-Solid Phase Epitaxy

WANG Lianwei;SHEN Qinwo;CHEN Xiangdong;LIN Xian;LIN Chenglu;ZOU Shichang

State Key Laboratory of Functional Materials for Informatics, Shanghai Institute of Metallurgy, Academia Sinica, Shanghai 200050

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WANG Lianwei, SHEN Qinwo, CHEN Xiangdong et al 1995 Chin. Phys. Lett. 12 301-304

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Abstract Reactive deposition-solid phase epitaxy has been developed for the epitaxial growth of thick β-FeSi₂film. Compared with the solid phase epitaxy, the crystal quality was improved. The orientation relationship mainly depends on the depositing condition. Observation by transmission electron microscope revealed the polycrystalline nature and the mean crystallite size was about 200nm.

Keywords: 68.55.Eg 68.55.Bd 68.55.Jk 68.55.Nq

Published: 01 May 1995

PACS:	68.55.Eg
	68.55.Bd
	68.55.Jk
	68.55.Nq	(Composition and phase identification)

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https://cpl.iphy.ac.cn/ OR https://cpl.iphy.ac.cn/Y1995/V12/I5/0301

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	WANG Lianwei
	SHEN Qinwo
	CHEN Xiangdong
	LIN Xian
	LIN Chenglu
	ZOU Shichang

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