Pulsed Laser Deposition of Optical Waveguiding LiNbO<suB>3</suB> Films on SiO<suB>2</suB> Substrate

Chin. Phys. Lett.

1995, Vol. 12

Issue (4): 249-252 DOI:

Original Articles

Pulsed Laser Deposition of Optical Waveguiding LiNbO₃ Films on SiO₂ Substrate

GUO Xinli;LIU Junming;LIU Zhiguo;ZHU Shining

National Laboratory of Solid State Microstructures, Nanjing University, Nanjing 210093 and Center for Advanced Studies in Science and Technology of Microstructures, Nanjing 210093

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GUO Xinli, LIU Junming, LIU Zhiguo et al 1995 Chin. Phys. Lett. 12 249-252

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Abstract The optical waveguiding lithium niobate (LiNbO₃) films have been prepared on (001)-oriented SiO₂ substrates by pulsed lager deposition technique. The x-ray diffraction and scanning electron microscopy were used to characterize the as-grown films, and revealed that highly (012)-textured LiNbO₃ films with smooth surface were achieved. The optical waveguiding properties of these films were demonstrated by m-line measurements of transverse-magnetic and transverse-electric multimodes.

Keywords: 81.15.Cd 68.55.Bd 78.65.Gb

Published: 01 April 1995

PACS:	81.15.Cd	(Deposition by sputtering)
	68.55.Bd
	78.65.Gb

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https://cpl.iphy.ac.cn/ OR https://cpl.iphy.ac.cn/Y1995/V12/I4/0249

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	GUO Xinli
	LIU Junming
	LIU Zhiguo
	ZHU Shining

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