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SEGREGATION EFFECT ON SURFACE COMPOSITION IN ALLOY SPUTTERING
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| ZHENG Liping1;LI Risheng2;LI Mingyao1;CUI Fuzhai3 |
| 1Shanghai Institute of Nuclear Research, Academia Sinica, P. O. Box 8204, Shanghai, 201800
2Institute of Metal Research, Academia Sinica, Shenyang, 110015
3Department of Engineering Physics, Tsinghua University, Beijing, 100084
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| Cite this article: |
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ZHENG Liping, LI Risheng, LI Mingyao et al 1990 Chin. Phys. Lett. 7 140-142 |
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Abstract The modified dynamic TCIS (Transport and atomic Collision cascade of energetic Ions an Solids) Monte Carlo program including the radiation-enhanced Gibbsian segregation (REGS) is employed to estimate the compositional distributions at surface of the Au0.56Cu0.44 alloy under 2keV Ar+ ion bombardment at high dose. The calculation results exhibit that the Au composition enriches in the first layer (74 at.%), depletes in the second layer (37 at.%) and gradually rises with depth to the bulk composition. The effect of the relation between sputter depth and segregation layer on the surface concentration of Au0.56Cu0.44 is also discussed.
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| Keywords:
79.20.Nc
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Published: 01 March 1990
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